2/5/2012	8:13:15 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/5/2012	8:13:16 AM	Recipe started at 8:13 AM
2/5/2012	8:13:16 AM	Helium valve closed
2/5/2012	8:13:16 AM	H2 valve closed
2/5/2012	8:13:16 AM	BCl3 valve closed
2/5/2012	8:13:16 AM	PH3 valve closed
2/5/2012	8:13:16 AM	SiCl4 pre valve closed
2/5/2012	8:13:16 AM	SiCl4 post valve closed
2/5/2012	8:13:16 AM	Main Vac valve closed
2/5/2012	8:13:16 AM	Bypass valve closed
2/5/2012	8:13:16 AM	Bubbler valve closed
2/5/2012	8:13:16 AM	Helium MFC set to  0.000000
2/5/2012	8:13:16 AM	H2 MFC set to  0.000000
2/5/2012	8:13:16 AM	BCl3 MFC set to  0.000000
2/5/2012	8:13:16 AM	PH3 MFC set to  0.000000
2/5/2012	8:13:16 AM	SiCl4 MFC set to  0.000000
2/5/2012	8:13:16 AM	Bypass solenoid MFC set to  0.000000
2/5/2012	8:13:16 AM	Tube furnace set to 0
2/5/2012	8:13:19 AM	H2 valve closed
2/5/2012	8:13:19 AM	BCl3 valve closed
2/5/2012	8:13:19 AM	PH3 valve closed
2/5/2012	8:13:19 AM	SiCl4 pre valve closed
2/5/2012	8:13:19 AM	SiCl4 post valve closed
2/5/2012	8:13:19 AM	Main Vac valve closed
2/5/2012	8:13:19 AM	Bypass valve closed
2/5/2012	8:13:19 AM	Bubbler valve closed
2/5/2012	8:13:19 AM	Helium valve opened
2/5/2012	8:13:19 AM	Helium MFC set to  500.000000
2/5/2012	8:13:19 AM	H2 MFC set to  0.000000
2/5/2012	8:13:19 AM	BCl3 MFC set to  0.000000
2/5/2012	8:13:19 AM	PH3 MFC set to  0.000000
2/5/2012	8:13:19 AM	SiCl4 MFC set to  0.000000
2/5/2012	8:13:19 AM	Bypass solenoid MFC set to  0.000000
2/5/2012	8:13:19 AM	Tube furnace set to 0
2/5/2012	8:14:24 AM	Helium valve closed
2/5/2012	8:14:24 AM	H2 valve closed
2/5/2012	8:14:24 AM	BCl3 valve closed
2/5/2012	8:14:24 AM	PH3 valve closed
2/5/2012	8:14:24 AM	SiCl4 pre valve closed
2/5/2012	8:14:24 AM	SiCl4 post valve closed
2/5/2012	8:14:24 AM	Main Vac valve closed
2/5/2012	8:14:24 AM	Bypass valve closed
2/5/2012	8:14:24 AM	Bubbler valve closed
2/5/2012	8:14:24 AM	Helium MFC set to  0.000000
2/5/2012	8:14:24 AM	H2 MFC set to  0.000000
2/5/2012	8:14:24 AM	BCl3 MFC set to  0.000000
2/5/2012	8:14:24 AM	PH3 MFC set to  0.000000
2/5/2012	8:14:24 AM	SiCl4 MFC set to  0.000000
2/5/2012	8:14:24 AM	Bypass solenoid MFC set to  0.000000
2/5/2012	8:14:24 AM	Tube furnace set to 0
2/5/2012	8:14:25 AM	Run finished at 8:14 AM
2/5/2012	8:14:25 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/5/2012	8:19:32 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/5/2012	8:19:33 AM	Recipe started at 8:19 AM
2/5/2012	8:19:33 AM	Helium valve closed
2/5/2012	8:19:33 AM	H2 valve closed
2/5/2012	8:19:33 AM	BCl3 valve closed
2/5/2012	8:19:33 AM	PH3 valve closed
2/5/2012	8:19:33 AM	SiCl4 pre valve closed
2/5/2012	8:19:33 AM	SiCl4 post valve closed
2/5/2012	8:19:33 AM	Main Vac valve closed
2/5/2012	8:19:33 AM	Bubbler valve closed
2/5/2012	8:19:33 AM	Bypass valve opened
2/5/2012	8:19:33 AM	Helium MFC set to  0.000000
2/5/2012	8:19:33 AM	H2 MFC set to  0.000000
2/5/2012	8:19:33 AM	BCl3 MFC set to  0.000000
2/5/2012	8:19:33 AM	PH3 MFC set to  0.000000
2/5/2012	8:19:33 AM	SiCl4 MFC set to  0.000000
2/5/2012	8:19:33 AM	Bypass solenoid MFC set to  0.000000
2/5/2012	8:19:33 AM	Tube furnace set to 0
2/5/2012	8:20:29 AM	Helium valve closed
2/5/2012	8:20:29 AM	H2 valve closed
2/5/2012	8:20:29 AM	BCl3 valve closed
2/5/2012	8:20:29 AM	PH3 valve closed
2/5/2012	8:20:29 AM	SiCl4 pre valve closed
2/5/2012	8:20:29 AM	SiCl4 post valve closed
2/5/2012	8:20:29 AM	Main Vac valve closed
2/5/2012	8:20:29 AM	Bubbler valve closed
2/5/2012	8:20:29 AM	Bypass valve opened
2/5/2012	8:20:29 AM	Helium MFC set to  0.000000
2/5/2012	8:20:29 AM	H2 MFC set to  0.000000
2/5/2012	8:20:29 AM	BCl3 MFC set to  0.000000
2/5/2012	8:20:29 AM	PH3 MFC set to  0.000000
2/5/2012	8:20:29 AM	SiCl4 MFC set to  0.000000
2/5/2012	8:20:29 AM	Bypass solenoid MFC set to  0.000000
2/5/2012	8:20:29 AM	Tube furnace set to 0
2/5/2012	8:20:50 AM	Helium valve closed
2/5/2012	8:20:50 AM	H2 valve closed
2/5/2012	8:20:50 AM	BCl3 valve closed
2/5/2012	8:20:50 AM	PH3 valve closed
2/5/2012	8:20:50 AM	SiCl4 pre valve closed
2/5/2012	8:20:50 AM	SiCl4 post valve closed
2/5/2012	8:20:50 AM	Bypass valve closed
2/5/2012	8:20:50 AM	Bubbler valve closed
2/5/2012	8:20:50 AM	Main Vac valve opened
2/5/2012	8:20:50 AM	Helium MFC set to  0.000000
2/5/2012	8:20:50 AM	H2 MFC set to  0.000000
2/5/2012	8:20:50 AM	BCl3 MFC set to  0.000000
2/5/2012	8:20:50 AM	PH3 MFC set to  0.000000
2/5/2012	8:20:50 AM	SiCl4 MFC set to  0.000000
2/5/2012	8:20:50 AM	Bypass solenoid MFC set to  0.000000
2/5/2012	8:20:51 AM	Tube furnace set to 0
2/5/2012	8:20:52 AM	Run finished at 8:20 AM
2/5/2012	8:20:52 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/5/2012	8:23:46 AM	Recipe started at 8:23 AM
2/5/2012	8:23:47 AM	Helium valve closed
2/5/2012	8:23:47 AM	H2 valve closed
2/5/2012	8:23:47 AM	BCl3 valve closed
2/5/2012	8:23:47 AM	PH3 valve closed
2/5/2012	8:23:47 AM	SiCl4 pre valve closed
2/5/2012	8:23:47 AM	SiCl4 post valve closed
2/5/2012	8:23:47 AM	Bypass valve closed
2/5/2012	8:23:47 AM	Bubbler valve closed
2/5/2012	8:23:47 AM	Main Vac valve opened
2/5/2012	8:23:47 AM	Helium MFC set to  0.000000
2/5/2012	8:23:47 AM	H2 MFC set to  0.000000
2/5/2012	8:23:47 AM	BCl3 MFC set to  0.000000
2/5/2012	8:23:47 AM	PH3 MFC set to  0.000000
2/5/2012	8:23:47 AM	SiCl4 MFC set to  0.000000
2/5/2012	8:23:47 AM	Bypass solenoid MFC set to  0.000000
2/5/2012	8:23:47 AM	Tube furnace set to 150
2/5/2012	8:24:17 AM	H2 valve closed
2/5/2012	8:24:17 AM	BCl3 valve closed
2/5/2012	8:24:17 AM	PH3 valve closed
2/5/2012	8:24:17 AM	SiCl4 pre valve closed
2/5/2012	8:24:17 AM	SiCl4 post valve closed
2/5/2012	8:24:17 AM	Bypass valve closed
2/5/2012	8:24:17 AM	Bubbler valve closed
2/5/2012	8:24:17 AM	Helium valve opened
2/5/2012	8:24:17 AM	Main Vac valve opened
2/5/2012	8:24:17 AM	Helium MFC set to  20.000000
2/5/2012	8:24:17 AM	H2 MFC set to  0.000000
2/5/2012	8:24:17 AM	BCl3 MFC set to  0.000000
2/5/2012	8:24:17 AM	PH3 MFC set to  0.000000
2/5/2012	8:24:17 AM	SiCl4 MFC set to  0.000000
2/5/2012	8:24:17 AM	Bypass solenoid MFC set to  0.000000
2/5/2012	8:24:17 AM	Tube furnace set to 150
2/5/2012	8:24:47 AM	Helium valve closed
2/5/2012	8:24:47 AM	H2 valve closed
2/5/2012	8:24:47 AM	BCl3 valve closed
2/5/2012	8:24:47 AM	PH3 valve closed
2/5/2012	8:24:47 AM	SiCl4 pre valve closed
2/5/2012	8:24:47 AM	SiCl4 post valve closed
2/5/2012	8:24:47 AM	Bypass valve closed
2/5/2012	8:24:47 AM	Bubbler valve closed
2/5/2012	8:24:47 AM	Main Vac valve opened
2/5/2012	8:24:47 AM	Helium MFC set to  0.000000
2/5/2012	8:24:47 AM	H2 MFC set to  0.000000
2/5/2012	8:24:47 AM	BCl3 MFC set to  0.000000
2/5/2012	8:24:47 AM	PH3 MFC set to  0.000000
2/5/2012	8:24:47 AM	SiCl4 MFC set to  0.000000
2/5/2012	8:24:47 AM	Bypass solenoid MFC set to  0.000000
2/5/2012	8:24:47 AM	Tube furnace set to 150
2/5/2012	8:25:17 AM	H2 valve closed
2/5/2012	8:25:17 AM	BCl3 valve closed
2/5/2012	8:25:17 AM	PH3 valve closed
2/5/2012	8:25:17 AM	SiCl4 pre valve closed
2/5/2012	8:25:17 AM	SiCl4 post valve closed
2/5/2012	8:25:17 AM	Bypass valve closed
2/5/2012	8:25:17 AM	Bubbler valve closed
2/5/2012	8:25:17 AM	Helium valve opened
2/5/2012	8:25:17 AM	Main Vac valve opened
2/5/2012	8:25:17 AM	Helium MFC set to  20.000000
2/5/2012	8:25:17 AM	H2 MFC set to  0.000000
2/5/2012	8:25:17 AM	BCl3 MFC set to  0.000000
2/5/2012	8:25:17 AM	PH3 MFC set to  0.000000
2/5/2012	8:25:17 AM	SiCl4 MFC set to  0.000000
2/5/2012	8:25:17 AM	Bypass solenoid MFC set to  0.000000
2/5/2012	8:25:17 AM	Tube furnace set to 150
2/5/2012	8:25:47 AM	Helium valve closed
2/5/2012	8:25:47 AM	H2 valve closed
2/5/2012	8:25:47 AM	BCl3 valve closed
2/5/2012	8:25:47 AM	PH3 valve closed
2/5/2012	8:25:47 AM	SiCl4 pre valve closed
2/5/2012	8:25:47 AM	SiCl4 post valve closed
2/5/2012	8:25:47 AM	Bypass valve closed
2/5/2012	8:25:47 AM	Bubbler valve closed
2/5/2012	8:25:47 AM	Main Vac valve opened
2/5/2012	8:25:47 AM	Helium MFC set to  0.000000
2/5/2012	8:25:47 AM	H2 MFC set to  0.000000
2/5/2012	8:25:47 AM	BCl3 MFC set to  0.000000
2/5/2012	8:25:47 AM	PH3 MFC set to  0.000000
2/5/2012	8:25:47 AM	SiCl4 MFC set to  0.000000
2/5/2012	8:25:47 AM	Bypass solenoid MFC set to  0.000000
2/5/2012	8:25:48 AM	Tube furnace set to 150
2/5/2012	8:26:18 AM	H2 valve closed
2/5/2012	8:26:18 AM	BCl3 valve closed
2/5/2012	8:26:18 AM	PH3 valve closed
2/5/2012	8:26:18 AM	SiCl4 pre valve closed
2/5/2012	8:26:18 AM	SiCl4 post valve closed
2/5/2012	8:26:18 AM	Bypass valve closed
2/5/2012	8:26:18 AM	Bubbler valve closed
2/5/2012	8:26:18 AM	Helium valve opened
2/5/2012	8:26:18 AM	Main Vac valve opened
2/5/2012	8:26:18 AM	Helium MFC set to  20.000000
2/5/2012	8:26:18 AM	H2 MFC set to  0.000000
2/5/2012	8:26:18 AM	BCl3 MFC set to  0.000000
2/5/2012	8:26:18 AM	PH3 MFC set to  0.000000
2/5/2012	8:26:18 AM	SiCl4 MFC set to  0.000000
2/5/2012	8:26:18 AM	Bypass solenoid MFC set to  0.000000
2/5/2012	8:26:18 AM	Tube furnace set to 150
2/5/2012	8:26:48 AM	Helium valve closed
2/5/2012	8:26:48 AM	H2 valve closed
2/5/2012	8:26:48 AM	BCl3 valve closed
2/5/2012	8:26:48 AM	PH3 valve closed
2/5/2012	8:26:48 AM	SiCl4 pre valve closed
2/5/2012	8:26:48 AM	SiCl4 post valve closed
2/5/2012	8:26:48 AM	Bypass valve closed
2/5/2012	8:26:48 AM	Bubbler valve closed
2/5/2012	8:26:48 AM	Main Vac valve opened
2/5/2012	8:26:48 AM	Helium MFC set to  0.000000
2/5/2012	8:26:48 AM	H2 MFC set to  0.000000
2/5/2012	8:26:48 AM	BCl3 MFC set to  0.000000
2/5/2012	8:26:48 AM	PH3 MFC set to  0.000000
2/5/2012	8:26:48 AM	SiCl4 MFC set to  0.000000
2/5/2012	8:26:48 AM	Bypass solenoid MFC set to  0.000000
2/5/2012	8:26:48 AM	Tube furnace set to 150
2/5/2012	8:27:18 AM	H2 valve closed
2/5/2012	8:27:18 AM	BCl3 valve closed
2/5/2012	8:27:18 AM	PH3 valve closed
2/5/2012	8:27:18 AM	SiCl4 pre valve closed
2/5/2012	8:27:18 AM	SiCl4 post valve closed
2/5/2012	8:27:18 AM	Bypass valve closed
2/5/2012	8:27:18 AM	Bubbler valve closed
2/5/2012	8:27:18 AM	Helium valve opened
2/5/2012	8:27:18 AM	Main Vac valve opened
2/5/2012	8:27:18 AM	Helium MFC set to  20.000000
2/5/2012	8:27:18 AM	H2 MFC set to  0.000000
2/5/2012	8:27:18 AM	BCl3 MFC set to  0.000000
2/5/2012	8:27:18 AM	PH3 MFC set to  0.000000
2/5/2012	8:27:18 AM	SiCl4 MFC set to  0.000000
2/5/2012	8:27:18 AM	Bypass solenoid MFC set to  0.000000
2/5/2012	8:27:18 AM	Tube furnace set to 150
2/5/2012	8:27:48 AM	Helium valve closed
2/5/2012	8:27:48 AM	H2 valve closed
2/5/2012	8:27:48 AM	BCl3 valve closed
2/5/2012	8:27:48 AM	PH3 valve closed
2/5/2012	8:27:48 AM	SiCl4 pre valve closed
2/5/2012	8:27:48 AM	SiCl4 post valve closed
2/5/2012	8:27:48 AM	Bypass valve closed
2/5/2012	8:27:48 AM	Bubbler valve closed
2/5/2012	8:27:48 AM	Main Vac valve opened
2/5/2012	8:27:48 AM	Helium MFC set to  0.000000
2/5/2012	8:27:48 AM	H2 MFC set to  0.000000
2/5/2012	8:27:48 AM	BCl3 MFC set to  0.000000
2/5/2012	8:27:48 AM	PH3 MFC set to  0.000000
2/5/2012	8:27:48 AM	SiCl4 MFC set to  0.000000
2/5/2012	8:27:48 AM	Bypass solenoid MFC set to  0.000000
2/5/2012	8:27:48 AM	Tube furnace set to 150
2/5/2012	8:28:18 AM	H2 valve closed
2/5/2012	8:28:18 AM	BCl3 valve closed
2/5/2012	8:28:18 AM	PH3 valve closed
2/5/2012	8:28:18 AM	SiCl4 pre valve closed
2/5/2012	8:28:18 AM	SiCl4 post valve closed
2/5/2012	8:28:18 AM	Bypass valve closed
2/5/2012	8:28:18 AM	Bubbler valve closed
2/5/2012	8:28:18 AM	Helium valve opened
2/5/2012	8:28:18 AM	Main Vac valve opened
2/5/2012	8:28:18 AM	Helium MFC set to  20.000000
2/5/2012	8:28:18 AM	H2 MFC set to  0.000000
2/5/2012	8:28:18 AM	BCl3 MFC set to  0.000000
2/5/2012	8:28:18 AM	PH3 MFC set to  0.000000
2/5/2012	8:28:18 AM	SiCl4 MFC set to  0.000000
2/5/2012	8:28:18 AM	Bypass solenoid MFC set to  0.000000
2/5/2012	8:28:19 AM	Tube furnace set to 150
2/5/2012	8:28:49 AM	Helium valve closed
2/5/2012	8:28:49 AM	H2 valve closed
2/5/2012	8:28:49 AM	BCl3 valve closed
2/5/2012	8:28:49 AM	PH3 valve closed
2/5/2012	8:28:49 AM	SiCl4 pre valve closed
2/5/2012	8:28:49 AM	SiCl4 post valve closed
2/5/2012	8:28:49 AM	Bypass valve closed
2/5/2012	8:28:49 AM	Bubbler valve closed
2/5/2012	8:28:49 AM	Main Vac valve opened
2/5/2012	8:28:49 AM	Helium MFC set to  0.000000
2/5/2012	8:28:49 AM	H2 MFC set to  0.000000
2/5/2012	8:28:49 AM	BCl3 MFC set to  0.000000
2/5/2012	8:28:49 AM	PH3 MFC set to  0.000000
2/5/2012	8:28:49 AM	SiCl4 MFC set to  0.000000
2/5/2012	8:28:49 AM	Bypass solenoid MFC set to  0.000000
2/5/2012	8:28:49 AM	Tube furnace set to 150
2/5/2012	8:29:19 AM	H2 valve closed
2/5/2012	8:29:19 AM	BCl3 valve closed
2/5/2012	8:29:19 AM	PH3 valve closed
2/5/2012	8:29:19 AM	SiCl4 pre valve closed
2/5/2012	8:29:19 AM	SiCl4 post valve closed
2/5/2012	8:29:19 AM	Bypass valve closed
2/5/2012	8:29:19 AM	Bubbler valve closed
2/5/2012	8:29:19 AM	Helium valve opened
2/5/2012	8:29:19 AM	Main Vac valve opened
2/5/2012	8:29:19 AM	Helium MFC set to  20.000000
2/5/2012	8:29:19 AM	H2 MFC set to  0.000000
2/5/2012	8:29:19 AM	BCl3 MFC set to  0.000000
2/5/2012	8:29:19 AM	PH3 MFC set to  0.000000
2/5/2012	8:29:19 AM	SiCl4 MFC set to  0.000000
2/5/2012	8:29:19 AM	Bypass solenoid MFC set to  0.000000
2/5/2012	8:29:19 AM	Tube furnace set to 150
2/5/2012	8:29:49 AM	Helium valve closed
2/5/2012	8:29:49 AM	H2 valve closed
2/5/2012	8:29:49 AM	BCl3 valve closed
2/5/2012	8:29:49 AM	PH3 valve closed
2/5/2012	8:29:49 AM	SiCl4 pre valve closed
2/5/2012	8:29:49 AM	SiCl4 post valve closed
2/5/2012	8:29:49 AM	Bypass valve closed
2/5/2012	8:29:49 AM	Bubbler valve closed
2/5/2012	8:29:49 AM	Main Vac valve opened
2/5/2012	8:29:49 AM	Helium MFC set to  0.000000
2/5/2012	8:29:49 AM	H2 MFC set to  0.000000
2/5/2012	8:29:49 AM	BCl3 MFC set to  0.000000
2/5/2012	8:29:49 AM	PH3 MFC set to  0.000000
2/5/2012	8:29:49 AM	SiCl4 MFC set to  0.000000
2/5/2012	8:29:49 AM	Bypass solenoid MFC set to  0.000000
2/5/2012	8:29:49 AM	Tube furnace set to 150
2/5/2012	8:30:19 AM	H2 valve closed
2/5/2012	8:30:19 AM	BCl3 valve closed
2/5/2012	8:30:19 AM	PH3 valve closed
2/5/2012	8:30:19 AM	SiCl4 pre valve closed
2/5/2012	8:30:19 AM	SiCl4 post valve closed
2/5/2012	8:30:19 AM	Bypass valve closed
2/5/2012	8:30:19 AM	Bubbler valve closed
2/5/2012	8:30:19 AM	Helium valve opened
2/5/2012	8:30:19 AM	Main Vac valve opened
2/5/2012	8:30:19 AM	Helium MFC set to  20.000000
2/5/2012	8:30:19 AM	H2 MFC set to  0.000000
2/5/2012	8:30:19 AM	BCl3 MFC set to  0.000000
2/5/2012	8:30:19 AM	PH3 MFC set to  0.000000
2/5/2012	8:30:19 AM	SiCl4 MFC set to  0.000000
2/5/2012	8:30:19 AM	Bypass solenoid MFC set to  0.000000
2/5/2012	8:30:19 AM	Tube furnace set to 150
2/5/2012	8:30:49 AM	Helium valve closed
2/5/2012	8:30:49 AM	H2 valve closed
2/5/2012	8:30:49 AM	BCl3 valve closed
2/5/2012	8:30:49 AM	PH3 valve closed
2/5/2012	8:30:49 AM	SiCl4 pre valve closed
2/5/2012	8:30:49 AM	SiCl4 post valve closed
2/5/2012	8:30:49 AM	Bypass valve closed
2/5/2012	8:30:49 AM	Bubbler valve closed
2/5/2012	8:30:49 AM	Main Vac valve opened
2/5/2012	8:30:49 AM	Helium MFC set to  0.000000
2/5/2012	8:30:49 AM	H2 MFC set to  0.000000
2/5/2012	8:30:49 AM	BCl3 MFC set to  0.000000
2/5/2012	8:30:49 AM	PH3 MFC set to  0.000000
2/5/2012	8:30:49 AM	SiCl4 MFC set to  0.000000
2/5/2012	8:30:49 AM	Bypass solenoid MFC set to  0.000000
2/5/2012	8:30:50 AM	Tube furnace set to 150
2/5/2012	8:31:20 AM	H2 valve closed
2/5/2012	8:31:20 AM	BCl3 valve closed
2/5/2012	8:31:20 AM	PH3 valve closed
2/5/2012	8:31:20 AM	SiCl4 pre valve closed
2/5/2012	8:31:20 AM	SiCl4 post valve closed
2/5/2012	8:31:20 AM	Bypass valve closed
2/5/2012	8:31:20 AM	Bubbler valve closed
2/5/2012	8:31:20 AM	Helium valve opened
2/5/2012	8:31:20 AM	Main Vac valve opened
2/5/2012	8:31:20 AM	Helium MFC set to  20.000000
2/5/2012	8:31:20 AM	H2 MFC set to  0.000000
2/5/2012	8:31:20 AM	BCl3 MFC set to  0.000000
2/5/2012	8:31:20 AM	PH3 MFC set to  0.000000
2/5/2012	8:31:20 AM	SiCl4 MFC set to  0.000000
2/5/2012	8:31:20 AM	Bypass solenoid MFC set to  0.000000
2/5/2012	8:31:20 AM	Tube furnace set to 150
2/5/2012	8:31:50 AM	Helium valve closed
2/5/2012	8:31:50 AM	H2 valve closed
2/5/2012	8:31:50 AM	BCl3 valve closed
2/5/2012	8:31:50 AM	PH3 valve closed
2/5/2012	8:31:50 AM	SiCl4 pre valve closed
2/5/2012	8:31:50 AM	SiCl4 post valve closed
2/5/2012	8:31:50 AM	Bypass valve closed
2/5/2012	8:31:50 AM	Bubbler valve closed
2/5/2012	8:31:50 AM	Main Vac valve opened
2/5/2012	8:31:50 AM	Helium MFC set to  0.000000
2/5/2012	8:31:50 AM	H2 MFC set to  0.000000
2/5/2012	8:31:50 AM	BCl3 MFC set to  0.000000
2/5/2012	8:31:50 AM	PH3 MFC set to  0.000000
2/5/2012	8:31:50 AM	SiCl4 MFC set to  0.000000
2/5/2012	8:31:50 AM	Bypass solenoid MFC set to  0.000000
2/5/2012	8:31:50 AM	Tube furnace set to 150
2/5/2012	8:32:20 AM	H2 valve closed
2/5/2012	8:32:20 AM	BCl3 valve closed
2/5/2012	8:32:20 AM	PH3 valve closed
2/5/2012	8:32:20 AM	SiCl4 pre valve closed
2/5/2012	8:32:20 AM	SiCl4 post valve closed
2/5/2012	8:32:20 AM	Bypass valve closed
2/5/2012	8:32:20 AM	Bubbler valve closed
2/5/2012	8:32:20 AM	Helium valve opened
2/5/2012	8:32:20 AM	Main Vac valve opened
2/5/2012	8:32:20 AM	Helium MFC set to  20.000000
2/5/2012	8:32:20 AM	H2 MFC set to  0.000000
2/5/2012	8:32:20 AM	BCl3 MFC set to  0.000000
2/5/2012	8:32:20 AM	PH3 MFC set to  0.000000
2/5/2012	8:32:20 AM	SiCl4 MFC set to  0.000000
2/5/2012	8:32:20 AM	Bypass solenoid MFC set to  0.000000
2/5/2012	8:32:20 AM	Tube furnace set to 150
2/5/2012	8:32:50 AM	Helium valve closed
2/5/2012	8:32:50 AM	H2 valve closed
2/5/2012	8:32:50 AM	BCl3 valve closed
2/5/2012	8:32:50 AM	PH3 valve closed
2/5/2012	8:32:50 AM	SiCl4 pre valve closed
2/5/2012	8:32:50 AM	SiCl4 post valve closed
2/5/2012	8:32:50 AM	Bypass valve closed
2/5/2012	8:32:50 AM	Bubbler valve closed
2/5/2012	8:32:50 AM	Main Vac valve opened
2/5/2012	8:32:50 AM	Helium MFC set to  0.000000
2/5/2012	8:32:50 AM	H2 MFC set to  0.000000
2/5/2012	8:32:50 AM	BCl3 MFC set to  0.000000
2/5/2012	8:32:50 AM	PH3 MFC set to  0.000000
2/5/2012	8:32:50 AM	SiCl4 MFC set to  0.000000
2/5/2012	8:32:50 AM	Bypass solenoid MFC set to  0.000000
2/5/2012	8:32:50 AM	Tube furnace set to 150
2/5/2012	8:33:20 AM	H2 valve closed
2/5/2012	8:33:20 AM	BCl3 valve closed
2/5/2012	8:33:20 AM	PH3 valve closed
2/5/2012	8:33:20 AM	SiCl4 pre valve closed
2/5/2012	8:33:20 AM	SiCl4 post valve closed
2/5/2012	8:33:20 AM	Bypass valve closed
2/5/2012	8:33:20 AM	Bubbler valve closed
2/5/2012	8:33:21 AM	Helium valve opened
2/5/2012	8:33:21 AM	Main Vac valve opened
2/5/2012	8:33:21 AM	Helium MFC set to  20.000000
2/5/2012	8:33:21 AM	H2 MFC set to  0.000000
2/5/2012	8:33:21 AM	BCl3 MFC set to  0.000000
2/5/2012	8:33:21 AM	PH3 MFC set to  0.000000
2/5/2012	8:33:21 AM	SiCl4 MFC set to  0.000000
2/5/2012	8:33:21 AM	Bypass solenoid MFC set to  0.000000
2/5/2012	8:33:21 AM	Tube furnace set to 150
2/5/2012	8:33:51 AM	Helium valve closed
2/5/2012	8:33:51 AM	H2 valve closed
2/5/2012	8:33:51 AM	BCl3 valve closed
2/5/2012	8:33:51 AM	PH3 valve closed
2/5/2012	8:33:51 AM	SiCl4 pre valve closed
2/5/2012	8:33:51 AM	SiCl4 post valve closed
2/5/2012	8:33:51 AM	Bypass valve closed
2/5/2012	8:33:51 AM	Bubbler valve closed
2/5/2012	8:33:51 AM	Main Vac valve opened
2/5/2012	8:33:51 AM	Helium MFC set to  0.000000
2/5/2012	8:33:51 AM	H2 MFC set to  0.000000
2/5/2012	8:33:51 AM	BCl3 MFC set to  0.000000
2/5/2012	8:33:51 AM	PH3 MFC set to  0.000000
2/5/2012	8:33:51 AM	SiCl4 MFC set to  0.000000
2/5/2012	8:33:51 AM	Bypass solenoid MFC set to  0.000000
2/5/2012	8:33:51 AM	Tube furnace set to 150
2/5/2012	8:33:52 AM	Run finished at 8:33 AM
2/5/2012	8:34:56 AM	Recipe started at 8:34 AM
2/5/2012	8:34:56 AM	Helium valve closed
2/5/2012	8:34:56 AM	H2 valve closed
2/5/2012	8:34:56 AM	BCl3 valve closed
2/5/2012	8:34:56 AM	PH3 valve closed
2/5/2012	8:34:56 AM	SiCl4 pre valve closed
2/5/2012	8:34:56 AM	SiCl4 post valve closed
2/5/2012	8:34:56 AM	Bypass valve closed
2/5/2012	8:34:56 AM	Bubbler valve closed
2/5/2012	8:34:56 AM	Main Vac valve opened
2/5/2012	8:34:56 AM	Helium MFC set to  0.000000
2/5/2012	8:34:56 AM	H2 MFC set to  0.000000
2/5/2012	8:34:56 AM	BCl3 MFC set to  0.000000
2/5/2012	8:34:56 AM	PH3 MFC set to  0.000000
2/5/2012	8:34:56 AM	SiCl4 MFC set to  0.000000
2/5/2012	8:34:56 AM	Bypass solenoid MFC set to  0.000000
2/5/2012	8:34:56 AM	Tube furnace set to 150
2/5/2012	8:35:26 AM	H2 valve closed
2/5/2012	8:35:26 AM	BCl3 valve closed
2/5/2012	8:35:26 AM	PH3 valve closed
2/5/2012	8:35:26 AM	SiCl4 pre valve closed
2/5/2012	8:35:26 AM	SiCl4 post valve closed
2/5/2012	8:35:26 AM	Bypass valve closed
2/5/2012	8:35:26 AM	Bubbler valve closed
2/5/2012	8:35:26 AM	Helium valve opened
2/5/2012	8:35:26 AM	Main Vac valve opened
2/5/2012	8:35:26 AM	Helium MFC set to  20.000000
2/5/2012	8:35:26 AM	H2 MFC set to  0.000000
2/5/2012	8:35:26 AM	BCl3 MFC set to  0.000000
2/5/2012	8:35:26 AM	PH3 MFC set to  0.000000
2/5/2012	8:35:26 AM	SiCl4 MFC set to  0.000000
2/5/2012	8:35:26 AM	Bypass solenoid MFC set to  0.000000
2/5/2012	8:35:26 AM	Tube furnace set to 150
2/5/2012	8:35:56 AM	Helium valve closed
2/5/2012	8:35:56 AM	H2 valve closed
2/5/2012	8:35:56 AM	BCl3 valve closed
2/5/2012	8:35:56 AM	PH3 valve closed
2/5/2012	8:35:56 AM	SiCl4 pre valve closed
2/5/2012	8:35:56 AM	SiCl4 post valve closed
2/5/2012	8:35:56 AM	Bypass valve closed
2/5/2012	8:35:56 AM	Bubbler valve closed
2/5/2012	8:35:56 AM	Main Vac valve opened
2/5/2012	8:35:56 AM	Helium MFC set to  0.000000
2/5/2012	8:35:56 AM	H2 MFC set to  0.000000
2/5/2012	8:35:56 AM	BCl3 MFC set to  0.000000
2/5/2012	8:35:56 AM	PH3 MFC set to  0.000000
2/5/2012	8:35:56 AM	SiCl4 MFC set to  0.000000
2/5/2012	8:35:56 AM	Bypass solenoid MFC set to  0.000000
2/5/2012	8:35:56 AM	Tube furnace set to 150
2/5/2012	8:36:26 AM	H2 valve closed
2/5/2012	8:36:26 AM	BCl3 valve closed
2/5/2012	8:36:26 AM	PH3 valve closed
2/5/2012	8:36:26 AM	SiCl4 pre valve closed
2/5/2012	8:36:26 AM	SiCl4 post valve closed
2/5/2012	8:36:26 AM	Bypass valve closed
2/5/2012	8:36:26 AM	Bubbler valve closed
2/5/2012	8:36:26 AM	Helium valve opened
2/5/2012	8:36:26 AM	Main Vac valve opened
2/5/2012	8:36:26 AM	Helium MFC set to  20.000000
2/5/2012	8:36:26 AM	H2 MFC set to  0.000000
2/5/2012	8:36:26 AM	BCl3 MFC set to  0.000000
2/5/2012	8:36:26 AM	PH3 MFC set to  0.000000
2/5/2012	8:36:26 AM	SiCl4 MFC set to  0.000000
2/5/2012	8:36:26 AM	Bypass solenoid MFC set to  0.000000
2/5/2012	8:36:27 AM	Tube furnace set to 150
2/5/2012	8:36:57 AM	Helium valve closed
2/5/2012	8:36:57 AM	H2 valve closed
2/5/2012	8:36:57 AM	BCl3 valve closed
2/5/2012	8:36:57 AM	PH3 valve closed
2/5/2012	8:36:57 AM	SiCl4 pre valve closed
2/5/2012	8:36:57 AM	SiCl4 post valve closed
2/5/2012	8:36:57 AM	Bypass valve closed
2/5/2012	8:36:57 AM	Bubbler valve closed
2/5/2012	8:36:57 AM	Main Vac valve opened
2/5/2012	8:36:57 AM	Helium MFC set to  0.000000
2/5/2012	8:36:57 AM	H2 MFC set to  0.000000
2/5/2012	8:36:57 AM	BCl3 MFC set to  0.000000
2/5/2012	8:36:57 AM	PH3 MFC set to  0.000000
2/5/2012	8:36:57 AM	SiCl4 MFC set to  0.000000
2/5/2012	8:36:57 AM	Bypass solenoid MFC set to  0.000000
2/5/2012	8:36:57 AM	Tube furnace set to 150
2/5/2012	8:37:27 AM	H2 valve closed
2/5/2012	8:37:27 AM	BCl3 valve closed
2/5/2012	8:37:27 AM	PH3 valve closed
2/5/2012	8:37:27 AM	SiCl4 pre valve closed
2/5/2012	8:37:27 AM	SiCl4 post valve closed
2/5/2012	8:37:27 AM	Bypass valve closed
2/5/2012	8:37:27 AM	Bubbler valve closed
2/5/2012	8:37:27 AM	Helium valve opened
2/5/2012	8:37:27 AM	Main Vac valve opened
2/5/2012	8:37:27 AM	Helium MFC set to  20.000000
2/5/2012	8:37:27 AM	H2 MFC set to  0.000000
2/5/2012	8:37:27 AM	BCl3 MFC set to  0.000000
2/5/2012	8:37:27 AM	PH3 MFC set to  0.000000
2/5/2012	8:37:27 AM	SiCl4 MFC set to  0.000000
2/5/2012	8:37:27 AM	Bypass solenoid MFC set to  0.000000
2/5/2012	8:37:27 AM	Tube furnace set to 150
2/5/2012	8:37:57 AM	Helium valve closed
2/5/2012	8:37:57 AM	H2 valve closed
2/5/2012	8:37:57 AM	BCl3 valve closed
2/5/2012	8:37:57 AM	PH3 valve closed
2/5/2012	8:37:57 AM	SiCl4 pre valve closed
2/5/2012	8:37:57 AM	SiCl4 post valve closed
2/5/2012	8:37:57 AM	Bypass valve closed
2/5/2012	8:37:57 AM	Bubbler valve closed
2/5/2012	8:37:57 AM	Main Vac valve opened
2/5/2012	8:37:57 AM	Helium MFC set to  0.000000
2/5/2012	8:37:57 AM	H2 MFC set to  0.000000
2/5/2012	8:37:57 AM	BCl3 MFC set to  0.000000
2/5/2012	8:37:57 AM	PH3 MFC set to  0.000000
2/5/2012	8:37:57 AM	SiCl4 MFC set to  0.000000
2/5/2012	8:37:57 AM	Bypass solenoid MFC set to  0.000000
2/5/2012	8:37:57 AM	Tube furnace set to 150
2/5/2012	8:38:27 AM	H2 valve closed
2/5/2012	8:38:27 AM	BCl3 valve closed
2/5/2012	8:38:27 AM	PH3 valve closed
2/5/2012	8:38:27 AM	SiCl4 pre valve closed
2/5/2012	8:38:27 AM	SiCl4 post valve closed
2/5/2012	8:38:27 AM	Bypass valve closed
2/5/2012	8:38:27 AM	Bubbler valve closed
2/5/2012	8:38:27 AM	Helium valve opened
2/5/2012	8:38:27 AM	Main Vac valve opened
2/5/2012	8:38:27 AM	Helium MFC set to  20.000000
2/5/2012	8:38:27 AM	H2 MFC set to  0.000000
2/5/2012	8:38:27 AM	BCl3 MFC set to  0.000000
2/5/2012	8:38:27 AM	PH3 MFC set to  0.000000
2/5/2012	8:38:27 AM	SiCl4 MFC set to  0.000000
2/5/2012	8:38:27 AM	Bypass solenoid MFC set to  0.000000
2/5/2012	8:38:27 AM	Tube furnace set to 150
2/5/2012	8:38:57 AM	Helium valve closed
2/5/2012	8:38:57 AM	H2 valve closed
2/5/2012	8:38:57 AM	BCl3 valve closed
2/5/2012	8:38:57 AM	PH3 valve closed
2/5/2012	8:38:57 AM	SiCl4 pre valve closed
2/5/2012	8:38:57 AM	SiCl4 post valve closed
2/5/2012	8:38:57 AM	Bypass valve closed
2/5/2012	8:38:57 AM	Bubbler valve closed
2/5/2012	8:38:57 AM	Main Vac valve opened
2/5/2012	8:38:57 AM	Helium MFC set to  0.000000
2/5/2012	8:38:57 AM	H2 MFC set to  0.000000
2/5/2012	8:38:57 AM	BCl3 MFC set to  0.000000
2/5/2012	8:38:57 AM	PH3 MFC set to  0.000000
2/5/2012	8:38:57 AM	SiCl4 MFC set to  0.000000
2/5/2012	8:38:57 AM	Bypass solenoid MFC set to  0.000000
2/5/2012	8:38:58 AM	Tube furnace set to 150
2/5/2012	8:39:28 AM	H2 valve closed
2/5/2012	8:39:28 AM	BCl3 valve closed
2/5/2012	8:39:28 AM	PH3 valve closed
2/5/2012	8:39:28 AM	SiCl4 pre valve closed
2/5/2012	8:39:28 AM	SiCl4 post valve closed
2/5/2012	8:39:28 AM	Bypass valve closed
2/5/2012	8:39:28 AM	Bubbler valve closed
2/5/2012	8:39:28 AM	Helium valve opened
2/5/2012	8:39:28 AM	Main Vac valve opened
2/5/2012	8:39:28 AM	Helium MFC set to  20.000000
2/5/2012	8:39:28 AM	H2 MFC set to  0.000000
2/5/2012	8:39:28 AM	BCl3 MFC set to  0.000000
2/5/2012	8:39:28 AM	PH3 MFC set to  0.000000
2/5/2012	8:39:28 AM	SiCl4 MFC set to  0.000000
2/5/2012	8:39:28 AM	Bypass solenoid MFC set to  0.000000
2/5/2012	8:39:28 AM	Tube furnace set to 150
2/5/2012	8:39:58 AM	Helium valve closed
2/5/2012	8:39:58 AM	H2 valve closed
2/5/2012	8:39:58 AM	BCl3 valve closed
2/5/2012	8:39:58 AM	PH3 valve closed
2/5/2012	8:39:58 AM	SiCl4 pre valve closed
2/5/2012	8:39:58 AM	SiCl4 post valve closed
2/5/2012	8:39:58 AM	Bypass valve closed
2/5/2012	8:39:58 AM	Bubbler valve closed
2/5/2012	8:39:58 AM	Main Vac valve opened
2/5/2012	8:39:58 AM	Helium MFC set to  0.000000
2/5/2012	8:39:58 AM	H2 MFC set to  0.000000
2/5/2012	8:39:58 AM	BCl3 MFC set to  0.000000
2/5/2012	8:39:58 AM	PH3 MFC set to  0.000000
2/5/2012	8:39:58 AM	SiCl4 MFC set to  0.000000
2/5/2012	8:39:58 AM	Bypass solenoid MFC set to  0.000000
2/5/2012	8:39:58 AM	Tube furnace set to 150
2/5/2012	8:40:28 AM	H2 valve closed
2/5/2012	8:40:28 AM	BCl3 valve closed
2/5/2012	8:40:28 AM	PH3 valve closed
2/5/2012	8:40:28 AM	SiCl4 pre valve closed
2/5/2012	8:40:28 AM	SiCl4 post valve closed
2/5/2012	8:40:28 AM	Bypass valve closed
2/5/2012	8:40:28 AM	Bubbler valve closed
2/5/2012	8:40:28 AM	Helium valve opened
2/5/2012	8:40:28 AM	Main Vac valve opened
2/5/2012	8:40:28 AM	Helium MFC set to  20.000000
2/5/2012	8:40:28 AM	H2 MFC set to  0.000000
2/5/2012	8:40:28 AM	BCl3 MFC set to  0.000000
2/5/2012	8:40:28 AM	PH3 MFC set to  0.000000
2/5/2012	8:40:28 AM	SiCl4 MFC set to  0.000000
2/5/2012	8:40:28 AM	Bypass solenoid MFC set to  0.000000
2/5/2012	8:40:28 AM	Tube furnace set to 150
2/5/2012	8:40:58 AM	Helium valve closed
2/5/2012	8:40:58 AM	H2 valve closed
2/5/2012	8:40:58 AM	BCl3 valve closed
2/5/2012	8:40:58 AM	PH3 valve closed
2/5/2012	8:40:58 AM	SiCl4 pre valve closed
2/5/2012	8:40:58 AM	SiCl4 post valve closed
2/5/2012	8:40:58 AM	Bypass valve closed
2/5/2012	8:40:58 AM	Bubbler valve closed
2/5/2012	8:40:58 AM	Main Vac valve opened
2/5/2012	8:40:58 AM	Helium MFC set to  0.000000
2/5/2012	8:40:58 AM	H2 MFC set to  0.000000
2/5/2012	8:40:58 AM	BCl3 MFC set to  0.000000
2/5/2012	8:40:58 AM	PH3 MFC set to  0.000000
2/5/2012	8:40:58 AM	SiCl4 MFC set to  0.000000
2/5/2012	8:40:58 AM	Bypass solenoid MFC set to  0.000000
2/5/2012	8:40:58 AM	Tube furnace set to 150
2/5/2012	8:41:28 AM	H2 valve closed
2/5/2012	8:41:28 AM	BCl3 valve closed
2/5/2012	8:41:28 AM	PH3 valve closed
2/5/2012	8:41:28 AM	SiCl4 pre valve closed
2/5/2012	8:41:28 AM	SiCl4 post valve closed
2/5/2012	8:41:28 AM	Bypass valve closed
2/5/2012	8:41:28 AM	Bubbler valve closed
2/5/2012	8:41:28 AM	Helium valve opened
2/5/2012	8:41:28 AM	Main Vac valve opened
2/5/2012	8:41:29 AM	Helium MFC set to  20.000000
2/5/2012	8:41:29 AM	H2 MFC set to  0.000000
2/5/2012	8:41:29 AM	BCl3 MFC set to  0.000000
2/5/2012	8:41:29 AM	PH3 MFC set to  0.000000
2/5/2012	8:41:29 AM	SiCl4 MFC set to  0.000000
2/5/2012	8:41:29 AM	Bypass solenoid MFC set to  0.000000
2/5/2012	8:41:29 AM	Tube furnace set to 150
2/5/2012	8:41:59 AM	Helium valve closed
2/5/2012	8:41:59 AM	H2 valve closed
2/5/2012	8:41:59 AM	BCl3 valve closed
2/5/2012	8:41:59 AM	PH3 valve closed
2/5/2012	8:41:59 AM	SiCl4 pre valve closed
2/5/2012	8:41:59 AM	SiCl4 post valve closed
2/5/2012	8:41:59 AM	Bypass valve closed
2/5/2012	8:41:59 AM	Bubbler valve closed
2/5/2012	8:41:59 AM	Main Vac valve opened
2/5/2012	8:41:59 AM	Helium MFC set to  0.000000
2/5/2012	8:41:59 AM	H2 MFC set to  0.000000
2/5/2012	8:41:59 AM	BCl3 MFC set to  0.000000
2/5/2012	8:41:59 AM	PH3 MFC set to  0.000000
2/5/2012	8:41:59 AM	SiCl4 MFC set to  0.000000
2/5/2012	8:41:59 AM	Bypass solenoid MFC set to  0.000000
2/5/2012	8:41:59 AM	Tube furnace set to 150
2/5/2012	8:42:29 AM	H2 valve closed
2/5/2012	8:42:29 AM	BCl3 valve closed
2/5/2012	8:42:29 AM	PH3 valve closed
2/5/2012	8:42:29 AM	SiCl4 pre valve closed
2/5/2012	8:42:29 AM	SiCl4 post valve closed
2/5/2012	8:42:29 AM	Bypass valve closed
2/5/2012	8:42:29 AM	Bubbler valve closed
2/5/2012	8:42:29 AM	Helium valve opened
2/5/2012	8:42:29 AM	Main Vac valve opened
2/5/2012	8:42:29 AM	Helium MFC set to  20.000000
2/5/2012	8:42:29 AM	H2 MFC set to  0.000000
2/5/2012	8:42:29 AM	BCl3 MFC set to  0.000000
2/5/2012	8:42:29 AM	PH3 MFC set to  0.000000
2/5/2012	8:42:29 AM	SiCl4 MFC set to  0.000000
2/5/2012	8:42:29 AM	Bypass solenoid MFC set to  0.000000
2/5/2012	8:42:29 AM	Tube furnace set to 150
2/5/2012	8:42:59 AM	Helium valve closed
2/5/2012	8:42:59 AM	H2 valve closed
2/5/2012	8:42:59 AM	BCl3 valve closed
2/5/2012	8:42:59 AM	PH3 valve closed
2/5/2012	8:42:59 AM	SiCl4 pre valve closed
2/5/2012	8:42:59 AM	SiCl4 post valve closed
2/5/2012	8:42:59 AM	Bypass valve closed
2/5/2012	8:42:59 AM	Bubbler valve closed
2/5/2012	8:42:59 AM	Main Vac valve opened
2/5/2012	8:42:59 AM	Helium MFC set to  0.000000
2/5/2012	8:42:59 AM	H2 MFC set to  0.000000
2/5/2012	8:42:59 AM	BCl3 MFC set to  0.000000
2/5/2012	8:42:59 AM	PH3 MFC set to  0.000000
2/5/2012	8:42:59 AM	SiCl4 MFC set to  0.000000
2/5/2012	8:42:59 AM	Bypass solenoid MFC set to  0.000000
2/5/2012	8:42:59 AM	Tube furnace set to 150
2/5/2012	8:43:29 AM	H2 valve closed
2/5/2012	8:43:29 AM	BCl3 valve closed
2/5/2012	8:43:29 AM	PH3 valve closed
2/5/2012	8:43:29 AM	SiCl4 pre valve closed
2/5/2012	8:43:29 AM	SiCl4 post valve closed
2/5/2012	8:43:29 AM	Bypass valve closed
2/5/2012	8:43:29 AM	Bubbler valve closed
2/5/2012	8:43:29 AM	Helium valve opened
2/5/2012	8:43:29 AM	Main Vac valve opened
2/5/2012	8:43:29 AM	Helium MFC set to  20.000000
2/5/2012	8:43:29 AM	H2 MFC set to  0.000000
2/5/2012	8:43:29 AM	BCl3 MFC set to  0.000000
2/5/2012	8:43:29 AM	PH3 MFC set to  0.000000
2/5/2012	8:43:29 AM	SiCl4 MFC set to  0.000000
2/5/2012	8:43:29 AM	Bypass solenoid MFC set to  0.000000
2/5/2012	8:43:29 AM	Tube furnace set to 150
2/5/2012	8:44:00 AM	Helium valve closed
2/5/2012	8:44:00 AM	H2 valve closed
2/5/2012	8:44:00 AM	BCl3 valve closed
2/5/2012	8:44:00 AM	PH3 valve closed
2/5/2012	8:44:00 AM	SiCl4 pre valve closed
2/5/2012	8:44:00 AM	SiCl4 post valve closed
2/5/2012	8:44:00 AM	Bypass valve closed
2/5/2012	8:44:00 AM	Bubbler valve closed
2/5/2012	8:44:00 AM	Main Vac valve opened
2/5/2012	8:44:00 AM	Helium MFC set to  0.000000
2/5/2012	8:44:00 AM	H2 MFC set to  0.000000
2/5/2012	8:44:00 AM	BCl3 MFC set to  0.000000
2/5/2012	8:44:00 AM	PH3 MFC set to  0.000000
2/5/2012	8:44:00 AM	SiCl4 MFC set to  0.000000
2/5/2012	8:44:00 AM	Bypass solenoid MFC set to  0.000000
2/5/2012	8:44:00 AM	Tube furnace set to 150
2/5/2012	8:44:30 AM	H2 valve closed
2/5/2012	8:44:30 AM	BCl3 valve closed
2/5/2012	8:44:30 AM	PH3 valve closed
2/5/2012	8:44:30 AM	SiCl4 pre valve closed
2/5/2012	8:44:30 AM	SiCl4 post valve closed
2/5/2012	8:44:30 AM	Bypass valve closed
2/5/2012	8:44:30 AM	Bubbler valve closed
2/5/2012	8:44:30 AM	Helium valve opened
2/5/2012	8:44:30 AM	Main Vac valve opened
2/5/2012	8:44:30 AM	Helium MFC set to  20.000000
2/5/2012	8:44:30 AM	H2 MFC set to  0.000000
2/5/2012	8:44:30 AM	BCl3 MFC set to  0.000000
2/5/2012	8:44:30 AM	PH3 MFC set to  0.000000
2/5/2012	8:44:30 AM	SiCl4 MFC set to  0.000000
2/5/2012	8:44:30 AM	Bypass solenoid MFC set to  0.000000
2/5/2012	8:44:30 AM	Tube furnace set to 150
2/5/2012	8:45:00 AM	Helium valve closed
2/5/2012	8:45:00 AM	H2 valve closed
2/5/2012	8:45:00 AM	BCl3 valve closed
2/5/2012	8:45:00 AM	PH3 valve closed
2/5/2012	8:45:00 AM	SiCl4 pre valve closed
2/5/2012	8:45:00 AM	SiCl4 post valve closed
2/5/2012	8:45:00 AM	Bypass valve closed
2/5/2012	8:45:00 AM	Bubbler valve closed
2/5/2012	8:45:00 AM	Main Vac valve opened
2/5/2012	8:45:00 AM	Helium MFC set to  0.000000
2/5/2012	8:45:00 AM	H2 MFC set to  0.000000
2/5/2012	8:45:00 AM	BCl3 MFC set to  0.000000
2/5/2012	8:45:00 AM	PH3 MFC set to  0.000000
2/5/2012	8:45:00 AM	SiCl4 MFC set to  0.000000
2/5/2012	8:45:00 AM	Bypass solenoid MFC set to  0.000000
2/5/2012	8:45:00 AM	Tube furnace set to 150
2/5/2012	8:45:01 AM	Run finished at 8:45 AM
2/5/2012	8:53:56 AM	Main Vac valve closed
2/5/2012	8:54:31 AM	Main Vac valve opened
2/5/2012	8:55:00 AM	Recipe started at 8:54 AM
2/5/2012	8:55:00 AM	Helium valve closed
2/5/2012	8:55:00 AM	H2 valve closed
2/5/2012	8:55:00 AM	BCl3 valve closed
2/5/2012	8:55:00 AM	PH3 valve closed
2/5/2012	8:55:00 AM	SiCl4 pre valve closed
2/5/2012	8:55:00 AM	SiCl4 post valve closed
2/5/2012	8:55:00 AM	Main Vac valve closed
2/5/2012	8:55:00 AM	Bypass valve closed
2/5/2012	8:55:00 AM	Bubbler valve closed
2/5/2012	8:55:00 AM	Helium MFC set to  0.000000
2/5/2012	8:55:00 AM	H2 MFC set to  0.000000
2/5/2012	8:55:00 AM	BCl3 MFC set to  0.000000
2/5/2012	8:55:00 AM	PH3 MFC set to  0.000000
2/5/2012	8:55:00 AM	SiCl4 MFC set to  0.000000
2/5/2012	8:55:00 AM	Bypass solenoid MFC set to  0.000000
2/5/2012	8:55:00 AM	Tube furnace set to 0
2/5/2012	8:55:03 AM	Helium valve closed
2/5/2012	8:55:03 AM	BCl3 valve closed
2/5/2012	8:55:03 AM	PH3 valve closed
2/5/2012	8:55:03 AM	SiCl4 pre valve closed
2/5/2012	8:55:03 AM	SiCl4 post valve closed
2/5/2012	8:55:03 AM	Main Vac valve closed
2/5/2012	8:55:03 AM	Bypass valve closed
2/5/2012	8:55:03 AM	Bubbler valve closed
2/5/2012	8:55:03 AM	H2 valve opened
2/5/2012	8:55:03 AM	Helium MFC set to  0.000000
2/5/2012	8:55:03 AM	H2 MFC set to  500.000000
2/5/2012	8:55:03 AM	BCl3 MFC set to  0.000000
2/5/2012	8:55:03 AM	PH3 MFC set to  0.000000
2/5/2012	8:55:03 AM	SiCl4 MFC set to  0.000000
2/5/2012	8:55:03 AM	Bypass solenoid MFC set to  0.000000
2/5/2012	8:55:03 AM	Tube furnace set to 0
2/5/2012	8:56:07 AM	Helium valve closed
2/5/2012	8:56:07 AM	BCl3 valve closed
2/5/2012	8:56:07 AM	PH3 valve closed
2/5/2012	8:56:07 AM	SiCl4 pre valve closed
2/5/2012	8:56:07 AM	SiCl4 post valve closed
2/5/2012	8:56:07 AM	Main Vac valve closed
2/5/2012	8:56:07 AM	Bypass valve closed
2/5/2012	8:56:07 AM	H2 valve opened
2/5/2012	8:56:07 AM	Bubbler valve opened
2/5/2012	8:56:07 AM	Helium MFC set to  0.000000
2/5/2012	8:56:07 AM	H2 MFC set to  500.000000
2/5/2012	8:56:07 AM	BCl3 MFC set to  0.000000
2/5/2012	8:56:07 AM	PH3 MFC set to  0.000000
2/5/2012	8:56:07 AM	SiCl4 MFC set to  0.000000
2/5/2012	8:56:07 AM	Bypass solenoid MFC set to  0.000000
2/5/2012	8:56:07 AM	Tube furnace set to 0
2/5/2012	8:56:08 AM	Helium valve closed
2/5/2012	8:56:08 AM	BCl3 valve closed
2/5/2012	8:56:08 AM	PH3 valve closed
2/5/2012	8:56:08 AM	SiCl4 pre valve closed
2/5/2012	8:56:08 AM	SiCl4 post valve closed
2/5/2012	8:56:08 AM	Main Vac valve closed
2/5/2012	8:56:08 AM	Bypass valve closed
2/5/2012	8:56:08 AM	H2 valve opened
2/5/2012	8:56:08 AM	Bubbler valve opened
2/5/2012	8:56:08 AM	Helium MFC set to  0.000000
2/5/2012	8:56:08 AM	H2 MFC set to  500.000000
2/5/2012	8:56:08 AM	BCl3 MFC set to  0.000000
2/5/2012	8:56:08 AM	PH3 MFC set to  0.000000
2/5/2012	8:56:08 AM	SiCl4 MFC set to  0.000000
2/5/2012	8:56:08 AM	Bypass solenoid MFC set to  0.000000
2/5/2012	8:56:08 AM	Tube furnace set to 1000
2/5/2012	9:26:08 AM	Helium valve closed
2/5/2012	9:26:08 AM	BCl3 valve closed
2/5/2012	9:26:08 AM	Main Vac valve closed
2/5/2012	9:26:08 AM	Bypass valve closed
2/5/2012	9:26:08 AM	H2 valve opened
2/5/2012	9:26:08 AM	PH3 valve opened
2/5/2012	9:26:08 AM	SiCl4 pre valve opened
2/5/2012	9:26:08 AM	SiCl4 post valve opened
2/5/2012	9:26:08 AM	Bubbler valve opened
2/5/2012	9:26:08 AM	Helium MFC set to  0.000000
2/5/2012	9:26:08 AM	H2 MFC set to  500.000000
2/5/2012	9:26:08 AM	BCl3 MFC set to  0.000000
2/5/2012	9:26:08 AM	PH3 MFC set to  0.300000
2/5/2012	9:26:08 AM	SiCl4 MFC set to  25.000000
2/5/2012	9:26:08 AM	Bypass solenoid MFC set to  0.000000
2/5/2012	9:26:08 AM	Tube furnace set to 1000
2/5/2012	9:51:09 AM	Helium valve closed
2/5/2012	9:51:09 AM	BCl3 valve closed
2/5/2012	9:51:09 AM	PH3 valve closed
2/5/2012	9:51:09 AM	SiCl4 pre valve closed
2/5/2012	9:51:09 AM	SiCl4 post valve closed
2/5/2012	9:51:09 AM	Main Vac valve closed
2/5/2012	9:51:09 AM	Bypass valve closed
2/5/2012	9:51:09 AM	H2 valve opened
2/5/2012	9:51:09 AM	Bubbler valve opened
2/5/2012	9:51:09 AM	Helium MFC set to  0.000000
2/5/2012	9:51:09 AM	H2 MFC set to  500.000000
2/5/2012	9:51:09 AM	BCl3 MFC set to  0.000000
2/5/2012	9:51:09 AM	PH3 MFC set to  0.000000
2/5/2012	9:51:09 AM	SiCl4 MFC set to  0.000000
2/5/2012	9:51:09 AM	Bypass solenoid MFC set to  0.000000
2/5/2012	9:51:09 AM	Tube furnace set to 750
2/5/2012	9:56:09 AM	H2 valve closed
2/5/2012	9:56:09 AM	BCl3 valve closed
2/5/2012	9:56:09 AM	PH3 valve closed
2/5/2012	9:56:09 AM	SiCl4 pre valve closed
2/5/2012	9:56:09 AM	SiCl4 post valve closed
2/5/2012	9:56:09 AM	Main Vac valve closed
2/5/2012	9:56:09 AM	Bypass valve closed
2/5/2012	9:56:09 AM	Helium valve opened
2/5/2012	9:56:09 AM	Bubbler valve opened
2/5/2012	9:56:09 AM	Helium MFC set to  500.000000
2/5/2012	9:56:09 AM	H2 MFC set to  0.000000
2/5/2012	9:56:09 AM	BCl3 MFC set to  0.000000
2/5/2012	9:56:09 AM	PH3 MFC set to  0.000000
2/5/2012	9:56:09 AM	SiCl4 MFC set to  0.000000
2/5/2012	9:56:09 AM	Bypass solenoid MFC set to  0.000000
2/5/2012	9:56:09 AM	Tube furnace set to 0
2/5/2012	10:12:35 AM	Helium valve closed
2/5/2012	10:12:35 AM	H2 valve closed
2/5/2012	10:12:35 AM	BCl3 valve closed
2/5/2012	10:12:35 AM	PH3 valve closed
2/5/2012	10:12:35 AM	SiCl4 pre valve closed
2/5/2012	10:12:35 AM	SiCl4 post valve closed
2/5/2012	10:12:35 AM	Main Vac valve closed
2/5/2012	10:12:35 AM	Bypass valve closed
2/5/2012	10:12:35 AM	Bubbler valve closed
2/5/2012	10:12:35 AM	Helium MFC set to  0.000000
2/5/2012	10:12:35 AM	H2 MFC set to  0.000000
2/5/2012	10:12:35 AM	BCl3 MFC set to  0.000000
2/5/2012	10:12:35 AM	PH3 MFC set to  0.000000
2/5/2012	10:12:35 AM	SiCl4 MFC set to  0.000000
2/5/2012	10:12:35 AM	Bypass solenoid MFC set to  0.000000
2/5/2012	10:12:35 AM	Tube furnace set to 0
2/5/2012	10:12:36 AM	Run finished at 10:12 AM
2/5/2012	10:16:38 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/5/2012	10:16:39 AM	Recipe started at 10:16 AM
2/5/2012	10:16:39 AM	Helium valve closed
2/5/2012	10:16:39 AM	H2 valve closed
2/5/2012	10:16:39 AM	BCl3 valve closed
2/5/2012	10:16:39 AM	PH3 valve closed
2/5/2012	10:16:39 AM	SiCl4 pre valve closed
2/5/2012	10:16:39 AM	SiCl4 post valve closed
2/5/2012	10:16:39 AM	Main Vac valve closed
2/5/2012	10:16:39 AM	Bubbler valve closed
2/5/2012	10:16:39 AM	Bypass valve opened
2/5/2012	10:16:39 AM	Helium MFC set to  0.000000
2/5/2012	10:16:39 AM	H2 MFC set to  0.000000
2/5/2012	10:16:39 AM	BCl3 MFC set to  0.000000
2/5/2012	10:16:39 AM	PH3 MFC set to  0.000000
2/5/2012	10:16:39 AM	SiCl4 MFC set to  0.000000
2/5/2012	10:16:39 AM	Bypass solenoid MFC set to  0.000000
2/5/2012	10:16:40 AM	Tube furnace set to 0
2/5/2012	10:17:36 AM	Helium valve closed
2/5/2012	10:17:36 AM	H2 valve closed
2/5/2012	10:17:36 AM	BCl3 valve closed
2/5/2012	10:17:36 AM	PH3 valve closed
2/5/2012	10:17:36 AM	SiCl4 pre valve closed
2/5/2012	10:17:36 AM	SiCl4 post valve closed
2/5/2012	10:17:36 AM	Main Vac valve closed
2/5/2012	10:17:36 AM	Bubbler valve closed
2/5/2012	10:17:36 AM	Bypass valve opened
2/5/2012	10:17:36 AM	Helium MFC set to  0.000000
2/5/2012	10:17:36 AM	H2 MFC set to  0.000000
2/5/2012	10:17:36 AM	BCl3 MFC set to  0.000000
2/5/2012	10:17:36 AM	PH3 MFC set to  0.000000
2/5/2012	10:17:36 AM	SiCl4 MFC set to  0.000000
2/5/2012	10:17:36 AM	Bypass solenoid MFC set to  0.000000
2/5/2012	10:17:36 AM	Tube furnace set to 0
2/5/2012	10:18:36 AM	Helium valve closed
2/5/2012	10:18:36 AM	H2 valve closed
2/5/2012	10:18:36 AM	BCl3 valve closed
2/5/2012	10:18:36 AM	PH3 valve closed
2/5/2012	10:18:36 AM	SiCl4 pre valve closed
2/5/2012	10:18:36 AM	SiCl4 post valve closed
2/5/2012	10:18:36 AM	Bypass valve closed
2/5/2012	10:18:36 AM	Bubbler valve closed
2/5/2012	10:18:36 AM	Main Vac valve opened
2/5/2012	10:18:36 AM	Helium MFC set to  0.000000
2/5/2012	10:18:36 AM	H2 MFC set to  0.000000
2/5/2012	10:18:36 AM	BCl3 MFC set to  0.000000
2/5/2012	10:18:36 AM	PH3 MFC set to  0.000000
2/5/2012	10:18:36 AM	SiCl4 MFC set to  0.000000
2/5/2012	10:18:36 AM	Bypass solenoid MFC set to  0.000000
2/5/2012	10:18:36 AM	Tube furnace set to 0
2/5/2012	10:18:37 AM	Run finished at 10:18 AM
2/5/2012	10:18:37 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/5/2012	10:33:24 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
2/5/2012	10:33:37 AM	Recipe started at 10:33 AM
2/5/2012	10:33:37 AM	Helium valve closed
2/5/2012	10:33:37 AM	H2 valve closed
2/5/2012	10:33:37 AM	BCl3 valve closed
2/5/2012	10:33:37 AM	PH3 valve closed
2/5/2012	10:33:37 AM	SiCl4 pre valve closed
2/5/2012	10:33:37 AM	SiCl4 post valve closed
2/5/2012	10:33:37 AM	Main Vac valve closed
2/5/2012	10:33:37 AM	Bubbler valve closed
2/5/2012	10:33:37 AM	Bypass valve opened
2/5/2012	10:33:37 AM	Helium MFC set to  0.000000
2/5/2012	10:33:37 AM	H2 MFC set to  0.000000
2/5/2012	10:33:37 AM	BCl3 MFC set to  0.000000
2/5/2012	10:33:37 AM	PH3 MFC set to  0.000000
2/5/2012	10:33:37 AM	SiCl4 MFC set to  0.000000
2/5/2012	10:33:37 AM	Bypass solenoid MFC set to  0.000000
2/5/2012	10:33:37 AM	Tube furnace set to 0
2/5/2012	10:33:38 AM	Helium valve closed
2/5/2012	10:33:38 AM	H2 valve closed
2/5/2012	10:33:38 AM	BCl3 valve closed
2/5/2012	10:33:38 AM	PH3 valve closed
2/5/2012	10:33:38 AM	SiCl4 pre valve closed
2/5/2012	10:33:38 AM	SiCl4 post valve closed
2/5/2012	10:33:38 AM	Main Vac valve closed
2/5/2012	10:33:38 AM	Bubbler valve closed
2/5/2012	10:33:38 AM	Bypass valve opened
2/5/2012	10:33:38 AM	Helium MFC set to  0.000000
2/5/2012	10:33:38 AM	H2 MFC set to  0.000000
2/5/2012	10:33:38 AM	BCl3 MFC set to  0.000000
2/5/2012	10:33:38 AM	PH3 MFC set to  0.000000
2/5/2012	10:33:38 AM	SiCl4 MFC set to  0.000000
2/5/2012	10:33:38 AM	Bypass solenoid MFC set to  0.000000
2/5/2012	10:33:38 AM	Tube furnace set to 0
2/5/2012	10:33:38 AM	Helium valve closed
2/5/2012	10:33:38 AM	H2 valve closed
2/5/2012	10:33:38 AM	BCl3 valve closed
2/5/2012	10:33:38 AM	PH3 valve closed
2/5/2012	10:33:38 AM	SiCl4 pre valve closed
2/5/2012	10:33:38 AM	SiCl4 post valve closed
2/5/2012	10:33:38 AM	Bypass valve closed
2/5/2012	10:33:38 AM	Bubbler valve closed
2/5/2012	10:33:38 AM	Main Vac valve opened
2/5/2012	10:33:38 AM	Helium MFC set to  0.000000
2/5/2012	10:33:38 AM	H2 MFC set to  0.000000
2/5/2012	10:33:38 AM	BCl3 MFC set to  0.000000
2/5/2012	10:33:38 AM	PH3 MFC set to  0.000000
2/5/2012	10:33:38 AM	SiCl4 MFC set to  0.000000
2/5/2012	10:33:38 AM	Bypass solenoid MFC set to  0.000000
2/5/2012	10:33:38 AM	Tube furnace set to 0
2/5/2012	10:33:39 AM	H2 valve closed
2/5/2012	10:33:39 AM	BCl3 valve closed
2/5/2012	10:33:39 AM	PH3 valve closed
2/5/2012	10:33:39 AM	SiCl4 pre valve closed
2/5/2012	10:33:39 AM	SiCl4 post valve closed
2/5/2012	10:33:39 AM	Bypass valve closed
2/5/2012	10:33:39 AM	Bubbler valve closed
2/5/2012	10:33:39 AM	Helium valve opened
2/5/2012	10:33:39 AM	Main Vac valve opened
2/5/2012	10:33:39 AM	Helium MFC set to  20.000000
2/5/2012	10:33:39 AM	H2 MFC set to  0.000000
2/5/2012	10:33:39 AM	BCl3 MFC set to  0.000000
2/5/2012	10:33:39 AM	PH3 MFC set to  0.000000
2/5/2012	10:33:39 AM	SiCl4 MFC set to  0.000000
2/5/2012	10:33:39 AM	Bypass solenoid MFC set to  0.000000
2/5/2012	10:33:39 AM	Tube furnace set to 0
2/5/2012	10:34:09 AM	Helium valve closed
2/5/2012	10:34:09 AM	H2 valve closed
2/5/2012	10:34:09 AM	BCl3 valve closed
2/5/2012	10:34:09 AM	PH3 valve closed
2/5/2012	10:34:09 AM	SiCl4 pre valve closed
2/5/2012	10:34:09 AM	SiCl4 post valve closed
2/5/2012	10:34:09 AM	Bypass valve closed
2/5/2012	10:34:09 AM	Bubbler valve closed
2/5/2012	10:34:09 AM	Main Vac valve opened
2/5/2012	10:34:09 AM	Helium MFC set to  0.000000
2/5/2012	10:34:09 AM	H2 MFC set to  0.000000
2/5/2012	10:34:09 AM	BCl3 MFC set to  0.000000
2/5/2012	10:34:09 AM	PH3 MFC set to  0.000000
2/5/2012	10:34:09 AM	SiCl4 MFC set to  0.000000
2/5/2012	10:34:09 AM	Bypass solenoid MFC set to  0.000000
2/5/2012	10:34:09 AM	Tube furnace set to 0
2/5/2012	10:34:39 AM	H2 valve closed
2/5/2012	10:34:39 AM	BCl3 valve closed
2/5/2012	10:34:39 AM	PH3 valve closed
2/5/2012	10:34:39 AM	SiCl4 pre valve closed
2/5/2012	10:34:39 AM	SiCl4 post valve closed
2/5/2012	10:34:39 AM	Bypass valve closed
2/5/2012	10:34:39 AM	Bubbler valve closed
2/5/2012	10:34:39 AM	Helium valve opened
2/5/2012	10:34:39 AM	Main Vac valve opened
2/5/2012	10:34:39 AM	Helium MFC set to  20.000000
2/5/2012	10:34:39 AM	H2 MFC set to  0.000000
2/5/2012	10:34:39 AM	BCl3 MFC set to  0.000000
2/5/2012	10:34:39 AM	PH3 MFC set to  0.000000
2/5/2012	10:34:39 AM	SiCl4 MFC set to  0.000000
2/5/2012	10:34:39 AM	Bypass solenoid MFC set to  0.000000
2/5/2012	10:34:39 AM	Tube furnace set to 0
2/5/2012	10:35:09 AM	Helium valve closed
2/5/2012	10:35:09 AM	H2 valve closed
2/5/2012	10:35:09 AM	BCl3 valve closed
2/5/2012	10:35:09 AM	PH3 valve closed
2/5/2012	10:35:09 AM	SiCl4 pre valve closed
2/5/2012	10:35:09 AM	SiCl4 post valve closed
2/5/2012	10:35:09 AM	Bypass valve closed
2/5/2012	10:35:09 AM	Bubbler valve closed
2/5/2012	10:35:09 AM	Main Vac valve opened
2/5/2012	10:35:09 AM	Helium MFC set to  0.000000
2/5/2012	10:35:09 AM	H2 MFC set to  0.000000
2/5/2012	10:35:09 AM	BCl3 MFC set to  0.000000
2/5/2012	10:35:09 AM	PH3 MFC set to  0.000000
2/5/2012	10:35:09 AM	SiCl4 MFC set to  0.000000
2/5/2012	10:35:09 AM	Bypass solenoid MFC set to  0.000000
2/5/2012	10:35:09 AM	Tube furnace set to 0
2/5/2012	10:35:39 AM	H2 valve closed
2/5/2012	10:35:39 AM	BCl3 valve closed
2/5/2012	10:35:39 AM	PH3 valve closed
2/5/2012	10:35:39 AM	SiCl4 pre valve closed
2/5/2012	10:35:39 AM	SiCl4 post valve closed
2/5/2012	10:35:39 AM	Bypass valve closed
2/5/2012	10:35:39 AM	Bubbler valve closed
2/5/2012	10:35:39 AM	Helium valve opened
2/5/2012	10:35:39 AM	Main Vac valve opened
2/5/2012	10:35:39 AM	Helium MFC set to  20.000000
2/5/2012	10:35:39 AM	H2 MFC set to  0.000000
2/5/2012	10:35:39 AM	BCl3 MFC set to  0.000000
2/5/2012	10:35:39 AM	PH3 MFC set to  0.000000
2/5/2012	10:35:39 AM	SiCl4 MFC set to  0.000000
2/5/2012	10:35:39 AM	Bypass solenoid MFC set to  0.000000
2/5/2012	10:35:40 AM	Tube furnace set to 0
2/5/2012	10:36:10 AM	Helium valve closed
2/5/2012	10:36:10 AM	H2 valve closed
2/5/2012	10:36:10 AM	BCl3 valve closed
2/5/2012	10:36:10 AM	PH3 valve closed
2/5/2012	10:36:10 AM	SiCl4 pre valve closed
2/5/2012	10:36:10 AM	SiCl4 post valve closed
2/5/2012	10:36:10 AM	Bypass valve closed
2/5/2012	10:36:10 AM	Bubbler valve closed
2/5/2012	10:36:10 AM	Main Vac valve opened
2/5/2012	10:36:10 AM	Helium MFC set to  0.000000
2/5/2012	10:36:10 AM	H2 MFC set to  0.000000
2/5/2012	10:36:10 AM	BCl3 MFC set to  0.000000
2/5/2012	10:36:10 AM	PH3 MFC set to  0.000000
2/5/2012	10:36:10 AM	SiCl4 MFC set to  0.000000
2/5/2012	10:36:10 AM	Bypass solenoid MFC set to  0.000000
2/5/2012	10:36:10 AM	Tube furnace set to 0
2/5/2012	10:36:40 AM	H2 valve closed
2/5/2012	10:36:40 AM	BCl3 valve closed
2/5/2012	10:36:40 AM	PH3 valve closed
2/5/2012	10:36:40 AM	SiCl4 pre valve closed
2/5/2012	10:36:40 AM	SiCl4 post valve closed
2/5/2012	10:36:40 AM	Bypass valve closed
2/5/2012	10:36:40 AM	Bubbler valve closed
2/5/2012	10:36:40 AM	Helium valve opened
2/5/2012	10:36:40 AM	Main Vac valve opened
2/5/2012	10:36:40 AM	Helium MFC set to  20.000000
2/5/2012	10:36:40 AM	H2 MFC set to  0.000000
2/5/2012	10:36:40 AM	BCl3 MFC set to  0.000000
2/5/2012	10:36:40 AM	PH3 MFC set to  0.000000
2/5/2012	10:36:40 AM	SiCl4 MFC set to  0.000000
2/5/2012	10:36:40 AM	Bypass solenoid MFC set to  0.000000
2/5/2012	10:36:40 AM	Tube furnace set to 0
2/5/2012	10:37:10 AM	Helium valve closed
2/5/2012	10:37:10 AM	H2 valve closed
2/5/2012	10:37:10 AM	BCl3 valve closed
2/5/2012	10:37:10 AM	PH3 valve closed
2/5/2012	10:37:10 AM	SiCl4 pre valve closed
2/5/2012	10:37:10 AM	SiCl4 post valve closed
2/5/2012	10:37:10 AM	Bypass valve closed
2/5/2012	10:37:10 AM	Bubbler valve closed
2/5/2012	10:37:10 AM	Main Vac valve opened
2/5/2012	10:37:10 AM	Helium MFC set to  0.000000
2/5/2012	10:37:10 AM	H2 MFC set to  0.000000
2/5/2012	10:37:10 AM	BCl3 MFC set to  0.000000
2/5/2012	10:37:10 AM	PH3 MFC set to  0.000000
2/5/2012	10:37:10 AM	SiCl4 MFC set to  0.000000
2/5/2012	10:37:10 AM	Bypass solenoid MFC set to  0.000000
2/5/2012	10:37:10 AM	Tube furnace set to 0
2/5/2012	10:37:40 AM	H2 valve closed
2/5/2012	10:37:40 AM	BCl3 valve closed
2/5/2012	10:37:40 AM	PH3 valve closed
2/5/2012	10:37:40 AM	SiCl4 pre valve closed
2/5/2012	10:37:40 AM	SiCl4 post valve closed
2/5/2012	10:37:40 AM	Bypass valve closed
2/5/2012	10:37:40 AM	Bubbler valve closed
2/5/2012	10:37:40 AM	Helium valve opened
2/5/2012	10:37:40 AM	Main Vac valve opened
2/5/2012	10:37:40 AM	Helium MFC set to  20.000000
2/5/2012	10:37:40 AM	H2 MFC set to  0.000000
2/5/2012	10:37:40 AM	BCl3 MFC set to  0.000000
2/5/2012	10:37:40 AM	PH3 MFC set to  0.000000
2/5/2012	10:37:40 AM	SiCl4 MFC set to  0.000000
2/5/2012	10:37:40 AM	Bypass solenoid MFC set to  0.000000
2/5/2012	10:37:40 AM	Tube furnace set to 0
2/5/2012	10:38:10 AM	Helium valve closed
2/5/2012	10:38:10 AM	H2 valve closed
2/5/2012	10:38:10 AM	BCl3 valve closed
2/5/2012	10:38:10 AM	PH3 valve closed
2/5/2012	10:38:10 AM	SiCl4 pre valve closed
2/5/2012	10:38:10 AM	SiCl4 post valve closed
2/5/2012	10:38:10 AM	Bypass valve closed
2/5/2012	10:38:10 AM	Bubbler valve closed
2/5/2012	10:38:10 AM	Main Vac valve opened
2/5/2012	10:38:10 AM	Helium MFC set to  0.000000
2/5/2012	10:38:10 AM	H2 MFC set to  0.000000
2/5/2012	10:38:10 AM	BCl3 MFC set to  0.000000
2/5/2012	10:38:10 AM	PH3 MFC set to  0.000000
2/5/2012	10:38:10 AM	SiCl4 MFC set to  0.000000
2/5/2012	10:38:10 AM	Bypass solenoid MFC set to  0.000000
2/5/2012	10:38:11 AM	Tube furnace set to 0
2/5/2012	10:38:41 AM	H2 valve closed
2/5/2012	10:38:41 AM	BCl3 valve closed
2/5/2012	10:38:41 AM	PH3 valve closed
2/5/2012	10:38:41 AM	SiCl4 pre valve closed
2/5/2012	10:38:41 AM	SiCl4 post valve closed
2/5/2012	10:38:41 AM	Bypass valve closed
2/5/2012	10:38:41 AM	Bubbler valve closed
2/5/2012	10:38:41 AM	Helium valve opened
2/5/2012	10:38:41 AM	Main Vac valve opened
2/5/2012	10:38:41 AM	Helium MFC set to  20.000000
2/5/2012	10:38:41 AM	H2 MFC set to  0.000000
2/5/2012	10:38:41 AM	BCl3 MFC set to  0.000000
2/5/2012	10:38:41 AM	PH3 MFC set to  0.000000
2/5/2012	10:38:41 AM	SiCl4 MFC set to  0.000000
2/5/2012	10:38:41 AM	Bypass solenoid MFC set to  0.000000
2/5/2012	10:38:41 AM	Tube furnace set to 0
2/5/2012	10:39:11 AM	Helium valve closed
2/5/2012	10:39:11 AM	H2 valve closed
2/5/2012	10:39:11 AM	BCl3 valve closed
2/5/2012	10:39:11 AM	PH3 valve closed
2/5/2012	10:39:11 AM	SiCl4 pre valve closed
2/5/2012	10:39:11 AM	SiCl4 post valve closed
2/5/2012	10:39:11 AM	Bypass valve closed
2/5/2012	10:39:11 AM	Bubbler valve closed
2/5/2012	10:39:11 AM	Main Vac valve opened
2/5/2012	10:39:11 AM	Helium MFC set to  0.000000
2/5/2012	10:39:11 AM	H2 MFC set to  0.000000
2/5/2012	10:39:11 AM	BCl3 MFC set to  0.000000
2/5/2012	10:39:11 AM	PH3 MFC set to  0.000000
2/5/2012	10:39:11 AM	SiCl4 MFC set to  0.000000
2/5/2012	10:39:11 AM	Bypass solenoid MFC set to  0.000000
2/5/2012	10:39:11 AM	Tube furnace set to 0
2/5/2012	10:39:41 AM	H2 valve closed
2/5/2012	10:39:41 AM	BCl3 valve closed
2/5/2012	10:39:41 AM	PH3 valve closed
2/5/2012	10:39:41 AM	SiCl4 pre valve closed
2/5/2012	10:39:41 AM	SiCl4 post valve closed
2/5/2012	10:39:41 AM	Bypass valve closed
2/5/2012	10:39:41 AM	Bubbler valve closed
2/5/2012	10:39:41 AM	Helium valve opened
2/5/2012	10:39:41 AM	Main Vac valve opened
2/5/2012	10:39:41 AM	Helium MFC set to  20.000000
2/5/2012	10:39:41 AM	H2 MFC set to  0.000000
2/5/2012	10:39:41 AM	BCl3 MFC set to  0.000000
2/5/2012	10:39:41 AM	PH3 MFC set to  0.000000
2/5/2012	10:39:41 AM	SiCl4 MFC set to  0.000000
2/5/2012	10:39:41 AM	Bypass solenoid MFC set to  0.000000
2/5/2012	10:39:41 AM	Tube furnace set to 0
2/5/2012	10:40:11 AM	Helium valve closed
2/5/2012	10:40:11 AM	H2 valve closed
2/5/2012	10:40:11 AM	BCl3 valve closed
2/5/2012	10:40:11 AM	PH3 valve closed
2/5/2012	10:40:11 AM	SiCl4 pre valve closed
2/5/2012	10:40:11 AM	SiCl4 post valve closed
2/5/2012	10:40:11 AM	Bypass valve closed
2/5/2012	10:40:11 AM	Bubbler valve closed
2/5/2012	10:40:11 AM	Main Vac valve opened
2/5/2012	10:40:11 AM	Helium MFC set to  0.000000
2/5/2012	10:40:11 AM	H2 MFC set to  0.000000
2/5/2012	10:40:11 AM	BCl3 MFC set to  0.000000
2/5/2012	10:40:11 AM	PH3 MFC set to  0.000000
2/5/2012	10:40:11 AM	SiCl4 MFC set to  0.000000
2/5/2012	10:40:11 AM	Bypass solenoid MFC set to  0.000000
2/5/2012	10:40:11 AM	Tube furnace set to 0
2/5/2012	10:40:41 AM	H2 valve closed
2/5/2012	10:40:41 AM	BCl3 valve closed
2/5/2012	10:40:41 AM	PH3 valve closed
2/5/2012	10:40:41 AM	SiCl4 pre valve closed
2/5/2012	10:40:41 AM	SiCl4 post valve closed
2/5/2012	10:40:41 AM	Bypass valve closed
2/5/2012	10:40:41 AM	Bubbler valve closed
2/5/2012	10:40:41 AM	Helium valve opened
2/5/2012	10:40:41 AM	Main Vac valve opened
2/5/2012	10:40:41 AM	Helium MFC set to  20.000000
2/5/2012	10:40:41 AM	H2 MFC set to  0.000000
2/5/2012	10:40:41 AM	BCl3 MFC set to  0.000000
2/5/2012	10:40:41 AM	PH3 MFC set to  0.000000
2/5/2012	10:40:41 AM	SiCl4 MFC set to  0.000000
2/5/2012	10:40:41 AM	Bypass solenoid MFC set to  0.000000
2/5/2012	10:40:42 AM	Tube furnace set to 0
2/5/2012	10:41:12 AM	Helium valve closed
2/5/2012	10:41:12 AM	H2 valve closed
2/5/2012	10:41:12 AM	BCl3 valve closed
2/5/2012	10:41:12 AM	PH3 valve closed
2/5/2012	10:41:12 AM	SiCl4 pre valve closed
2/5/2012	10:41:12 AM	SiCl4 post valve closed
2/5/2012	10:41:12 AM	Bypass valve closed
2/5/2012	10:41:12 AM	Bubbler valve closed
2/5/2012	10:41:12 AM	Main Vac valve opened
2/5/2012	10:41:12 AM	Helium MFC set to  0.000000
2/5/2012	10:41:12 AM	H2 MFC set to  0.000000
2/5/2012	10:41:12 AM	BCl3 MFC set to  0.000000
2/5/2012	10:41:12 AM	PH3 MFC set to  0.000000
2/5/2012	10:41:12 AM	SiCl4 MFC set to  0.000000
2/5/2012	10:41:12 AM	Bypass solenoid MFC set to  0.000000
2/5/2012	10:41:12 AM	Tube furnace set to 0
2/5/2012	10:41:42 AM	H2 valve closed
2/5/2012	10:41:42 AM	BCl3 valve closed
2/5/2012	10:41:42 AM	PH3 valve closed
2/5/2012	10:41:42 AM	SiCl4 pre valve closed
2/5/2012	10:41:42 AM	SiCl4 post valve closed
2/5/2012	10:41:42 AM	Bypass valve closed
2/5/2012	10:41:42 AM	Bubbler valve closed
2/5/2012	10:41:42 AM	Helium valve opened
2/5/2012	10:41:42 AM	Main Vac valve opened
2/5/2012	10:41:42 AM	Helium MFC set to  20.000000
2/5/2012	10:41:42 AM	H2 MFC set to  0.000000
2/5/2012	10:41:42 AM	BCl3 MFC set to  0.000000
2/5/2012	10:41:42 AM	PH3 MFC set to  0.000000
2/5/2012	10:41:42 AM	SiCl4 MFC set to  0.000000
2/5/2012	10:41:42 AM	Bypass solenoid MFC set to  0.000000
2/5/2012	10:41:42 AM	Tube furnace set to 0
2/5/2012	10:42:12 AM	Helium valve closed
2/5/2012	10:42:12 AM	H2 valve closed
2/5/2012	10:42:12 AM	BCl3 valve closed
2/5/2012	10:42:12 AM	PH3 valve closed
2/5/2012	10:42:12 AM	SiCl4 pre valve closed
2/5/2012	10:42:12 AM	SiCl4 post valve closed
2/5/2012	10:42:12 AM	Bypass valve closed
2/5/2012	10:42:12 AM	Bubbler valve closed
2/5/2012	10:42:12 AM	Main Vac valve opened
2/5/2012	10:42:12 AM	Helium MFC set to  0.000000
2/5/2012	10:42:12 AM	H2 MFC set to  0.000000
2/5/2012	10:42:12 AM	BCl3 MFC set to  0.000000
2/5/2012	10:42:12 AM	PH3 MFC set to  0.000000
2/5/2012	10:42:12 AM	SiCl4 MFC set to  0.000000
2/5/2012	10:42:12 AM	Bypass solenoid MFC set to  0.000000
2/5/2012	10:42:12 AM	Tube furnace set to 0
2/5/2012	10:42:42 AM	H2 valve closed
2/5/2012	10:42:42 AM	BCl3 valve closed
2/5/2012	10:42:42 AM	PH3 valve closed
2/5/2012	10:42:42 AM	SiCl4 pre valve closed
2/5/2012	10:42:42 AM	SiCl4 post valve closed
2/5/2012	10:42:42 AM	Bypass valve closed
2/5/2012	10:42:42 AM	Bubbler valve closed
2/5/2012	10:42:42 AM	Helium valve opened
2/5/2012	10:42:42 AM	Main Vac valve opened
2/5/2012	10:42:42 AM	Helium MFC set to  20.000000
2/5/2012	10:42:42 AM	H2 MFC set to  0.000000
2/5/2012	10:42:42 AM	BCl3 MFC set to  0.000000
2/5/2012	10:42:42 AM	PH3 MFC set to  0.000000
2/5/2012	10:42:42 AM	SiCl4 MFC set to  0.000000
2/5/2012	10:42:42 AM	Bypass solenoid MFC set to  0.000000
2/5/2012	10:42:42 AM	Tube furnace set to 0
2/5/2012	10:43:12 AM	Helium valve closed
2/5/2012	10:43:12 AM	H2 valve closed
2/5/2012	10:43:12 AM	BCl3 valve closed
2/5/2012	10:43:12 AM	PH3 valve closed
2/5/2012	10:43:12 AM	SiCl4 pre valve closed
2/5/2012	10:43:12 AM	SiCl4 post valve closed
2/5/2012	10:43:12 AM	Bypass valve closed
2/5/2012	10:43:12 AM	Bubbler valve closed
2/5/2012	10:43:12 AM	Main Vac valve opened
2/5/2012	10:43:12 AM	Helium MFC set to  0.000000
2/5/2012	10:43:12 AM	H2 MFC set to  0.000000
2/5/2012	10:43:12 AM	BCl3 MFC set to  0.000000
2/5/2012	10:43:12 AM	PH3 MFC set to  0.000000
2/5/2012	10:43:12 AM	SiCl4 MFC set to  0.000000
2/5/2012	10:43:12 AM	Bypass solenoid MFC set to  0.000000
2/5/2012	10:43:13 AM	Tube furnace set to 0
2/5/2012	10:43:14 AM	Run finished at 10:43 AM
2/5/2012	10:43:14 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
2/5/2012	10:51:06 AM	Main Vac valve closed
2/5/2012	10:51:32 AM	Main Vac valve opened
2/5/2012	10:52:50 AM	Recipe started at 10:52 AM
2/5/2012	10:52:50 AM	Helium valve closed
2/5/2012	10:52:50 AM	H2 valve closed
2/5/2012	10:52:50 AM	BCl3 valve closed
2/5/2012	10:52:50 AM	PH3 valve closed
2/5/2012	10:52:50 AM	SiCl4 pre valve closed
2/5/2012	10:52:50 AM	SiCl4 post valve closed
2/5/2012	10:52:50 AM	Main Vac valve closed
2/5/2012	10:52:50 AM	Bypass valve closed
2/5/2012	10:52:50 AM	Bubbler valve closed
2/5/2012	10:52:50 AM	Helium MFC set to  0.000000
2/5/2012	10:52:50 AM	H2 MFC set to  0.000000
2/5/2012	10:52:50 AM	BCl3 MFC set to  0.000000
2/5/2012	10:52:50 AM	PH3 MFC set to  0.000000
2/5/2012	10:52:50 AM	SiCl4 MFC set to  0.000000
2/5/2012	10:52:50 AM	Bypass solenoid MFC set to  0.000000
2/5/2012	10:52:50 AM	Tube furnace set to 0
2/5/2012	10:52:53 AM	Helium valve closed
2/5/2012	10:52:53 AM	BCl3 valve closed
2/5/2012	10:52:53 AM	PH3 valve closed
2/5/2012	10:52:53 AM	SiCl4 pre valve closed
2/5/2012	10:52:53 AM	SiCl4 post valve closed
2/5/2012	10:52:53 AM	Main Vac valve closed
2/5/2012	10:52:53 AM	Bypass valve closed
2/5/2012	10:52:54 AM	Bubbler valve closed
2/5/2012	10:52:54 AM	H2 valve opened
2/5/2012	10:52:54 AM	Helium MFC set to  0.000000
2/5/2012	10:52:54 AM	H2 MFC set to  500.000000
2/5/2012	10:52:54 AM	BCl3 MFC set to  0.000000
2/5/2012	10:52:54 AM	PH3 MFC set to  0.000000
2/5/2012	10:52:54 AM	SiCl4 MFC set to  0.000000
2/5/2012	10:52:54 AM	Bypass solenoid MFC set to  0.000000
2/5/2012	10:52:54 AM	Tube furnace set to 0
2/5/2012	10:53:59 AM	Helium valve closed
2/5/2012	10:53:59 AM	BCl3 valve closed
2/5/2012	10:53:59 AM	PH3 valve closed
2/5/2012	10:53:59 AM	SiCl4 pre valve closed
2/5/2012	10:53:59 AM	SiCl4 post valve closed
2/5/2012	10:53:59 AM	Main Vac valve closed
2/5/2012	10:53:59 AM	Bypass valve closed
2/5/2012	10:53:59 AM	H2 valve opened
2/5/2012	10:53:59 AM	Bubbler valve opened
2/5/2012	10:53:59 AM	Helium MFC set to  0.000000
2/5/2012	10:53:59 AM	H2 MFC set to  500.000000
2/5/2012	10:53:59 AM	BCl3 MFC set to  0.000000
2/5/2012	10:53:59 AM	PH3 MFC set to  0.000000
2/5/2012	10:53:59 AM	SiCl4 MFC set to  0.000000
2/5/2012	10:53:59 AM	Bypass solenoid MFC set to  0.000000
2/5/2012	10:53:59 AM	Tube furnace set to 0
2/5/2012	10:54:00 AM	Helium valve closed
2/5/2012	10:54:00 AM	BCl3 valve closed
2/5/2012	10:54:00 AM	PH3 valve closed
2/5/2012	10:54:00 AM	SiCl4 pre valve closed
2/5/2012	10:54:00 AM	SiCl4 post valve closed
2/5/2012	10:54:00 AM	Main Vac valve closed
2/5/2012	10:54:00 AM	Bypass valve closed
2/5/2012	10:54:00 AM	H2 valve opened
2/5/2012	10:54:00 AM	Bubbler valve opened
2/5/2012	10:54:00 AM	Helium MFC set to  0.000000
2/5/2012	10:54:00 AM	H2 MFC set to  500.000000
2/5/2012	10:54:00 AM	BCl3 MFC set to  0.000000
2/5/2012	10:54:00 AM	PH3 MFC set to  0.000000
2/5/2012	10:54:00 AM	SiCl4 MFC set to  0.000000
2/5/2012	10:54:00 AM	Bypass solenoid MFC set to  0.000000
2/5/2012	10:54:00 AM	Tube furnace set to 1000
2/5/2012	11:24:00 AM	Helium valve closed
2/5/2012	11:24:00 AM	BCl3 valve closed
2/5/2012	11:24:00 AM	Main Vac valve closed
2/5/2012	11:24:00 AM	Bypass valve closed
2/5/2012	11:24:00 AM	H2 valve opened
2/5/2012	11:24:00 AM	PH3 valve opened
2/5/2012	11:24:00 AM	SiCl4 pre valve opened
2/5/2012	11:24:00 AM	SiCl4 post valve opened
2/5/2012	11:24:00 AM	Bubbler valve opened
2/5/2012	11:24:00 AM	Helium MFC set to  0.000000
2/5/2012	11:24:00 AM	H2 MFC set to  500.000000
2/5/2012	11:24:00 AM	BCl3 MFC set to  0.000000
2/5/2012	11:24:00 AM	PH3 MFC set to  0.300000
2/5/2012	11:24:00 AM	SiCl4 MFC set to  25.000000
2/5/2012	11:24:00 AM	Bypass solenoid MFC set to  0.000000
2/5/2012	11:24:00 AM	Tube furnace set to 1000
2/5/2012	11:49:00 AM	Helium valve closed
2/5/2012	11:49:00 AM	BCl3 valve closed
2/5/2012	11:49:00 AM	PH3 valve closed
2/5/2012	11:49:00 AM	SiCl4 pre valve closed
2/5/2012	11:49:00 AM	SiCl4 post valve closed
2/5/2012	11:49:00 AM	Main Vac valve closed
2/5/2012	11:49:00 AM	Bypass valve closed
2/5/2012	11:49:00 AM	H2 valve opened
2/5/2012	11:49:00 AM	Bubbler valve opened
2/5/2012	11:49:00 AM	Helium MFC set to  0.000000
2/5/2012	11:49:00 AM	H2 MFC set to  500.000000
2/5/2012	11:49:00 AM	BCl3 MFC set to  0.000000
2/5/2012	11:49:00 AM	PH3 MFC set to  0.000000
2/5/2012	11:49:00 AM	SiCl4 MFC set to  0.000000
2/5/2012	11:49:00 AM	Bypass solenoid MFC set to  0.000000
2/5/2012	11:49:00 AM	Tube furnace set to 750
2/5/2012	11:54:00 AM	H2 valve closed
2/5/2012	11:54:00 AM	BCl3 valve closed
2/5/2012	11:54:00 AM	PH3 valve closed
2/5/2012	11:54:00 AM	SiCl4 pre valve closed
2/5/2012	11:54:00 AM	SiCl4 post valve closed
2/5/2012	11:54:00 AM	Main Vac valve closed
2/5/2012	11:54:00 AM	Bypass valve closed
2/5/2012	11:54:00 AM	Helium valve opened
2/5/2012	11:54:00 AM	Bubbler valve opened
2/5/2012	11:54:00 AM	Helium MFC set to  500.000000
2/5/2012	11:54:00 AM	H2 MFC set to  0.000000
2/5/2012	11:54:00 AM	BCl3 MFC set to  0.000000
2/5/2012	11:54:00 AM	PH3 MFC set to  0.000000
2/5/2012	11:54:00 AM	SiCl4 MFC set to  0.000000
2/5/2012	11:54:00 AM	Bypass solenoid MFC set to  0.000000
2/5/2012	11:54:01 AM	Tube furnace set to 0
2/5/2012	12:14:01 PM	Helium valve closed
2/5/2012	12:14:01 PM	H2 valve closed
2/5/2012	12:14:01 PM	BCl3 valve closed
2/5/2012	12:14:01 PM	PH3 valve closed
2/5/2012	12:14:01 PM	SiCl4 pre valve closed
2/5/2012	12:14:01 PM	SiCl4 post valve closed
2/5/2012	12:14:01 PM	Main Vac valve closed
2/5/2012	12:14:01 PM	Bypass valve closed
2/5/2012	12:14:01 PM	Bubbler valve closed
2/5/2012	12:14:01 PM	Helium MFC set to  0.000000
2/5/2012	12:14:01 PM	H2 MFC set to  0.000000
2/5/2012	12:14:01 PM	BCl3 MFC set to  0.000000
2/5/2012	12:14:01 PM	PH3 MFC set to  0.000000
2/5/2012	12:14:01 PM	SiCl4 MFC set to  0.000000
2/5/2012	12:14:01 PM	Bypass solenoid MFC set to  0.000000
2/5/2012	12:14:01 PM	Tube furnace set to 0
2/5/2012	12:14:02 PM	Run finished at 12:14 PM
2/5/2012	12:18:05 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/5/2012	12:18:06 PM	Recipe started at 12:18 PM
2/5/2012	12:18:06 PM	Helium valve closed
2/5/2012	12:18:06 PM	H2 valve closed
2/5/2012	12:18:06 PM	BCl3 valve closed
2/5/2012	12:18:06 PM	PH3 valve closed
2/5/2012	12:18:06 PM	SiCl4 pre valve closed
2/5/2012	12:18:06 PM	SiCl4 post valve closed
2/5/2012	12:18:06 PM	Main Vac valve closed
2/5/2012	12:18:06 PM	Bubbler valve closed
2/5/2012	12:18:06 PM	Bypass valve opened
2/5/2012	12:18:06 PM	Helium MFC set to  0.000000
2/5/2012	12:18:06 PM	H2 MFC set to  0.000000
2/5/2012	12:18:06 PM	BCl3 MFC set to  0.000000
2/5/2012	12:18:06 PM	PH3 MFC set to  0.000000
2/5/2012	12:18:06 PM	SiCl4 MFC set to  0.000000
2/5/2012	12:18:06 PM	Bypass solenoid MFC set to  0.000000
2/5/2012	12:18:06 PM	Tube furnace set to 0
2/5/2012	12:19:01 PM	Helium valve closed
2/5/2012	12:19:01 PM	H2 valve closed
2/5/2012	12:19:01 PM	BCl3 valve closed
2/5/2012	12:19:01 PM	PH3 valve closed
2/5/2012	12:19:01 PM	SiCl4 pre valve closed
2/5/2012	12:19:01 PM	SiCl4 post valve closed
2/5/2012	12:19:01 PM	Main Vac valve closed
2/5/2012	12:19:01 PM	Bubbler valve closed
2/5/2012	12:19:01 PM	Bypass valve opened
2/5/2012	12:19:01 PM	Helium MFC set to  0.000000
2/5/2012	12:19:01 PM	H2 MFC set to  0.000000
2/5/2012	12:19:01 PM	BCl3 MFC set to  0.000000
2/5/2012	12:19:01 PM	PH3 MFC set to  0.000000
2/5/2012	12:19:01 PM	SiCl4 MFC set to  0.000000
2/5/2012	12:19:01 PM	Bypass solenoid MFC set to  0.000000
2/5/2012	12:19:01 PM	Tube furnace set to 0
2/5/2012	12:20:01 PM	Helium valve closed
2/5/2012	12:20:01 PM	H2 valve closed
2/5/2012	12:20:01 PM	BCl3 valve closed
2/5/2012	12:20:01 PM	PH3 valve closed
2/5/2012	12:20:01 PM	SiCl4 pre valve closed
2/5/2012	12:20:01 PM	SiCl4 post valve closed
2/5/2012	12:20:01 PM	Bypass valve closed
2/5/2012	12:20:01 PM	Bubbler valve closed
2/5/2012	12:20:01 PM	Main Vac valve opened
2/5/2012	12:20:01 PM	Helium MFC set to  0.000000
2/5/2012	12:20:01 PM	H2 MFC set to  0.000000
2/5/2012	12:20:01 PM	BCl3 MFC set to  0.000000
2/5/2012	12:20:01 PM	PH3 MFC set to  0.000000
2/5/2012	12:20:01 PM	SiCl4 MFC set to  0.000000
2/5/2012	12:20:01 PM	Bypass solenoid MFC set to  0.000000
2/5/2012	12:20:01 PM	Tube furnace set to 0
2/5/2012	12:20:02 PM	Run finished at 12:20 PM
2/5/2012	12:20:02 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/5/2012	12:30:18 PM	Recipe started at 12:30 PM
2/5/2012	12:30:18 PM	Helium valve closed
2/5/2012	12:30:18 PM	H2 valve closed
2/5/2012	12:30:18 PM	BCl3 valve closed
2/5/2012	12:30:18 PM	PH3 valve closed
2/5/2012	12:30:18 PM	SiCl4 pre valve closed
2/5/2012	12:30:18 PM	SiCl4 post valve closed
2/5/2012	12:30:18 PM	Bypass valve closed
2/5/2012	12:30:18 PM	Bubbler valve closed
2/5/2012	12:30:18 PM	Main Vac valve opened
2/5/2012	12:30:18 PM	Helium MFC set to  0.000000
2/5/2012	12:30:18 PM	H2 MFC set to  0.000000
2/5/2012	12:30:18 PM	BCl3 MFC set to  0.000000
2/5/2012	12:30:18 PM	PH3 MFC set to  0.000000
2/5/2012	12:30:18 PM	SiCl4 MFC set to  0.000000
2/5/2012	12:30:18 PM	Bypass solenoid MFC set to  0.000000
2/5/2012	12:30:18 PM	Tube furnace set to 150
2/5/2012	12:30:48 PM	H2 valve closed
2/5/2012	12:30:48 PM	BCl3 valve closed
2/5/2012	12:30:48 PM	PH3 valve closed
2/5/2012	12:30:48 PM	SiCl4 pre valve closed
2/5/2012	12:30:48 PM	SiCl4 post valve closed
2/5/2012	12:30:48 PM	Bypass valve closed
2/5/2012	12:30:48 PM	Bubbler valve closed
2/5/2012	12:30:48 PM	Helium valve opened
2/5/2012	12:30:48 PM	Main Vac valve opened
2/5/2012	12:30:48 PM	Helium MFC set to  20.000000
2/5/2012	12:30:48 PM	H2 MFC set to  0.000000
2/5/2012	12:30:48 PM	BCl3 MFC set to  0.000000
2/5/2012	12:30:48 PM	PH3 MFC set to  0.000000
2/5/2012	12:30:48 PM	SiCl4 MFC set to  0.000000
2/5/2012	12:30:48 PM	Bypass solenoid MFC set to  0.000000
2/5/2012	12:30:48 PM	Tube furnace set to 150
2/5/2012	12:31:18 PM	Helium valve closed
2/5/2012	12:31:18 PM	H2 valve closed
2/5/2012	12:31:18 PM	BCl3 valve closed
2/5/2012	12:31:18 PM	PH3 valve closed
2/5/2012	12:31:18 PM	SiCl4 pre valve closed
2/5/2012	12:31:18 PM	SiCl4 post valve closed
2/5/2012	12:31:18 PM	Bypass valve closed
2/5/2012	12:31:18 PM	Bubbler valve closed
2/5/2012	12:31:18 PM	Main Vac valve opened
2/5/2012	12:31:18 PM	Helium MFC set to  0.000000
2/5/2012	12:31:18 PM	H2 MFC set to  0.000000
2/5/2012	12:31:18 PM	BCl3 MFC set to  0.000000
2/5/2012	12:31:18 PM	PH3 MFC set to  0.000000
2/5/2012	12:31:18 PM	SiCl4 MFC set to  0.000000
2/5/2012	12:31:18 PM	Bypass solenoid MFC set to  0.000000
2/5/2012	12:31:18 PM	Tube furnace set to 150
2/5/2012	12:31:48 PM	H2 valve closed
2/5/2012	12:31:48 PM	BCl3 valve closed
2/5/2012	12:31:48 PM	PH3 valve closed
2/5/2012	12:31:48 PM	SiCl4 pre valve closed
2/5/2012	12:31:48 PM	SiCl4 post valve closed
2/5/2012	12:31:48 PM	Bypass valve closed
2/5/2012	12:31:48 PM	Bubbler valve closed
2/5/2012	12:31:48 PM	Helium valve opened
2/5/2012	12:31:48 PM	Main Vac valve opened
2/5/2012	12:31:48 PM	Helium MFC set to  20.000000
2/5/2012	12:31:48 PM	H2 MFC set to  0.000000
2/5/2012	12:31:48 PM	BCl3 MFC set to  0.000000
2/5/2012	12:31:48 PM	PH3 MFC set to  0.000000
2/5/2012	12:31:48 PM	SiCl4 MFC set to  0.000000
2/5/2012	12:31:48 PM	Bypass solenoid MFC set to  0.000000
2/5/2012	12:31:49 PM	Tube furnace set to 150
2/5/2012	12:32:19 PM	Helium valve closed
2/5/2012	12:32:19 PM	H2 valve closed
2/5/2012	12:32:19 PM	BCl3 valve closed
2/5/2012	12:32:19 PM	PH3 valve closed
2/5/2012	12:32:19 PM	SiCl4 pre valve closed
2/5/2012	12:32:19 PM	SiCl4 post valve closed
2/5/2012	12:32:19 PM	Bypass valve closed
2/5/2012	12:32:19 PM	Bubbler valve closed
2/5/2012	12:32:19 PM	Main Vac valve opened
2/5/2012	12:32:19 PM	Helium MFC set to  0.000000
2/5/2012	12:32:19 PM	H2 MFC set to  0.000000
2/5/2012	12:32:19 PM	BCl3 MFC set to  0.000000
2/5/2012	12:32:19 PM	PH3 MFC set to  0.000000
2/5/2012	12:32:19 PM	SiCl4 MFC set to  0.000000
2/5/2012	12:32:19 PM	Bypass solenoid MFC set to  0.000000
2/5/2012	12:32:19 PM	Tube furnace set to 150
2/5/2012	12:32:49 PM	H2 valve closed
2/5/2012	12:32:49 PM	BCl3 valve closed
2/5/2012	12:32:49 PM	PH3 valve closed
2/5/2012	12:32:49 PM	SiCl4 pre valve closed
2/5/2012	12:32:49 PM	SiCl4 post valve closed
2/5/2012	12:32:49 PM	Bypass valve closed
2/5/2012	12:32:49 PM	Bubbler valve closed
2/5/2012	12:32:49 PM	Helium valve opened
2/5/2012	12:32:49 PM	Main Vac valve opened
2/5/2012	12:32:49 PM	Helium MFC set to  20.000000
2/5/2012	12:32:49 PM	H2 MFC set to  0.000000
2/5/2012	12:32:49 PM	BCl3 MFC set to  0.000000
2/5/2012	12:32:49 PM	PH3 MFC set to  0.000000
2/5/2012	12:32:49 PM	SiCl4 MFC set to  0.000000
2/5/2012	12:32:49 PM	Bypass solenoid MFC set to  0.000000
2/5/2012	12:32:49 PM	Tube furnace set to 150
2/5/2012	12:33:19 PM	Helium valve closed
2/5/2012	12:33:19 PM	H2 valve closed
2/5/2012	12:33:19 PM	BCl3 valve closed
2/5/2012	12:33:19 PM	PH3 valve closed
2/5/2012	12:33:19 PM	SiCl4 pre valve closed
2/5/2012	12:33:19 PM	SiCl4 post valve closed
2/5/2012	12:33:19 PM	Bypass valve closed
2/5/2012	12:33:19 PM	Bubbler valve closed
2/5/2012	12:33:19 PM	Main Vac valve opened
2/5/2012	12:33:19 PM	Helium MFC set to  0.000000
2/5/2012	12:33:19 PM	H2 MFC set to  0.000000
2/5/2012	12:33:19 PM	BCl3 MFC set to  0.000000
2/5/2012	12:33:19 PM	PH3 MFC set to  0.000000
2/5/2012	12:33:19 PM	SiCl4 MFC set to  0.000000
2/5/2012	12:33:19 PM	Bypass solenoid MFC set to  0.000000
2/5/2012	12:33:19 PM	Tube furnace set to 150
2/5/2012	12:33:49 PM	H2 valve closed
2/5/2012	12:33:49 PM	BCl3 valve closed
2/5/2012	12:33:49 PM	PH3 valve closed
2/5/2012	12:33:49 PM	SiCl4 pre valve closed
2/5/2012	12:33:49 PM	SiCl4 post valve closed
2/5/2012	12:33:49 PM	Bypass valve closed
2/5/2012	12:33:49 PM	Bubbler valve closed
2/5/2012	12:33:49 PM	Helium valve opened
2/5/2012	12:33:49 PM	Main Vac valve opened
2/5/2012	12:33:49 PM	Helium MFC set to  20.000000
2/5/2012	12:33:49 PM	H2 MFC set to  0.000000
2/5/2012	12:33:49 PM	BCl3 MFC set to  0.000000
2/5/2012	12:33:49 PM	PH3 MFC set to  0.000000
2/5/2012	12:33:49 PM	SiCl4 MFC set to  0.000000
2/5/2012	12:33:49 PM	Bypass solenoid MFC set to  0.000000
2/5/2012	12:33:49 PM	Tube furnace set to 150
2/5/2012	12:34:19 PM	Helium valve closed
2/5/2012	12:34:19 PM	H2 valve closed
2/5/2012	12:34:19 PM	BCl3 valve closed
2/5/2012	12:34:19 PM	PH3 valve closed
2/5/2012	12:34:19 PM	SiCl4 pre valve closed
2/5/2012	12:34:19 PM	SiCl4 post valve closed
2/5/2012	12:34:19 PM	Bypass valve closed
2/5/2012	12:34:19 PM	Bubbler valve closed
2/5/2012	12:34:19 PM	Main Vac valve opened
2/5/2012	12:34:19 PM	Helium MFC set to  0.000000
2/5/2012	12:34:19 PM	H2 MFC set to  0.000000
2/5/2012	12:34:19 PM	BCl3 MFC set to  0.000000
2/5/2012	12:34:19 PM	PH3 MFC set to  0.000000
2/5/2012	12:34:19 PM	SiCl4 MFC set to  0.000000
2/5/2012	12:34:19 PM	Bypass solenoid MFC set to  0.000000
2/5/2012	12:34:20 PM	Tube furnace set to 150
2/5/2012	12:34:50 PM	H2 valve closed
2/5/2012	12:34:50 PM	BCl3 valve closed
2/5/2012	12:34:50 PM	PH3 valve closed
2/5/2012	12:34:50 PM	SiCl4 pre valve closed
2/5/2012	12:34:50 PM	SiCl4 post valve closed
2/5/2012	12:34:50 PM	Bypass valve closed
2/5/2012	12:34:50 PM	Bubbler valve closed
2/5/2012	12:34:50 PM	Helium valve opened
2/5/2012	12:34:50 PM	Main Vac valve opened
2/5/2012	12:34:50 PM	Helium MFC set to  20.000000
2/5/2012	12:34:50 PM	H2 MFC set to  0.000000
2/5/2012	12:34:50 PM	BCl3 MFC set to  0.000000
2/5/2012	12:34:50 PM	PH3 MFC set to  0.000000
2/5/2012	12:34:50 PM	SiCl4 MFC set to  0.000000
2/5/2012	12:34:50 PM	Bypass solenoid MFC set to  0.000000
2/5/2012	12:34:50 PM	Tube furnace set to 150
2/5/2012	12:35:20 PM	Helium valve closed
2/5/2012	12:35:20 PM	H2 valve closed
2/5/2012	12:35:20 PM	BCl3 valve closed
2/5/2012	12:35:20 PM	PH3 valve closed
2/5/2012	12:35:20 PM	SiCl4 pre valve closed
2/5/2012	12:35:20 PM	SiCl4 post valve closed
2/5/2012	12:35:20 PM	Bypass valve closed
2/5/2012	12:35:20 PM	Bubbler valve closed
2/5/2012	12:35:20 PM	Main Vac valve opened
2/5/2012	12:35:20 PM	Helium MFC set to  0.000000
2/5/2012	12:35:20 PM	H2 MFC set to  0.000000
2/5/2012	12:35:20 PM	BCl3 MFC set to  0.000000
2/5/2012	12:35:20 PM	PH3 MFC set to  0.000000
2/5/2012	12:35:20 PM	SiCl4 MFC set to  0.000000
2/5/2012	12:35:20 PM	Bypass solenoid MFC set to  0.000000
2/5/2012	12:35:20 PM	Tube furnace set to 150
2/5/2012	12:35:50 PM	H2 valve closed
2/5/2012	12:35:50 PM	BCl3 valve closed
2/5/2012	12:35:50 PM	PH3 valve closed
2/5/2012	12:35:50 PM	SiCl4 pre valve closed
2/5/2012	12:35:50 PM	SiCl4 post valve closed
2/5/2012	12:35:50 PM	Bypass valve closed
2/5/2012	12:35:50 PM	Bubbler valve closed
2/5/2012	12:35:50 PM	Helium valve opened
2/5/2012	12:35:50 PM	Main Vac valve opened
2/5/2012	12:35:50 PM	Helium MFC set to  20.000000
2/5/2012	12:35:50 PM	H2 MFC set to  0.000000
2/5/2012	12:35:50 PM	BCl3 MFC set to  0.000000
2/5/2012	12:35:50 PM	PH3 MFC set to  0.000000
2/5/2012	12:35:50 PM	SiCl4 MFC set to  0.000000
2/5/2012	12:35:50 PM	Bypass solenoid MFC set to  0.000000
2/5/2012	12:35:50 PM	Tube furnace set to 150
2/5/2012	12:36:20 PM	Helium valve closed
2/5/2012	12:36:20 PM	H2 valve closed
2/5/2012	12:36:20 PM	BCl3 valve closed
2/5/2012	12:36:20 PM	PH3 valve closed
2/5/2012	12:36:20 PM	SiCl4 pre valve closed
2/5/2012	12:36:20 PM	SiCl4 post valve closed
2/5/2012	12:36:20 PM	Bypass valve closed
2/5/2012	12:36:20 PM	Bubbler valve closed
2/5/2012	12:36:20 PM	Main Vac valve opened
2/5/2012	12:36:20 PM	Helium MFC set to  0.000000
2/5/2012	12:36:20 PM	H2 MFC set to  0.000000
2/5/2012	12:36:20 PM	BCl3 MFC set to  0.000000
2/5/2012	12:36:20 PM	PH3 MFC set to  0.000000
2/5/2012	12:36:20 PM	SiCl4 MFC set to  0.000000
2/5/2012	12:36:20 PM	Bypass solenoid MFC set to  0.000000
2/5/2012	12:36:20 PM	Tube furnace set to 150
2/5/2012	12:36:50 PM	H2 valve closed
2/5/2012	12:36:50 PM	BCl3 valve closed
2/5/2012	12:36:50 PM	PH3 valve closed
2/5/2012	12:36:50 PM	SiCl4 pre valve closed
2/5/2012	12:36:50 PM	SiCl4 post valve closed
2/5/2012	12:36:50 PM	Bypass valve closed
2/5/2012	12:36:50 PM	Bubbler valve closed
2/5/2012	12:36:51 PM	Helium valve opened
2/5/2012	12:36:51 PM	Main Vac valve opened
2/5/2012	12:36:51 PM	Helium MFC set to  20.000000
2/5/2012	12:36:51 PM	H2 MFC set to  0.000000
2/5/2012	12:36:51 PM	BCl3 MFC set to  0.000000
2/5/2012	12:36:51 PM	PH3 MFC set to  0.000000
2/5/2012	12:36:51 PM	SiCl4 MFC set to  0.000000
2/5/2012	12:36:51 PM	Bypass solenoid MFC set to  0.000000
2/5/2012	12:36:51 PM	Tube furnace set to 150
2/5/2012	12:37:21 PM	Helium valve closed
2/5/2012	12:37:21 PM	H2 valve closed
2/5/2012	12:37:21 PM	BCl3 valve closed
2/5/2012	12:37:21 PM	PH3 valve closed
2/5/2012	12:37:21 PM	SiCl4 pre valve closed
2/5/2012	12:37:21 PM	SiCl4 post valve closed
2/5/2012	12:37:21 PM	Bypass valve closed
2/5/2012	12:37:21 PM	Bubbler valve closed
2/5/2012	12:37:21 PM	Main Vac valve opened
2/5/2012	12:37:21 PM	Helium MFC set to  0.000000
2/5/2012	12:37:21 PM	H2 MFC set to  0.000000
2/5/2012	12:37:21 PM	BCl3 MFC set to  0.000000
2/5/2012	12:37:21 PM	PH3 MFC set to  0.000000
2/5/2012	12:37:21 PM	SiCl4 MFC set to  0.000000
2/5/2012	12:37:21 PM	Bypass solenoid MFC set to  0.000000
2/5/2012	12:37:21 PM	Tube furnace set to 150
2/5/2012	12:37:51 PM	H2 valve closed
2/5/2012	12:37:51 PM	BCl3 valve closed
2/5/2012	12:37:51 PM	PH3 valve closed
2/5/2012	12:37:51 PM	SiCl4 pre valve closed
2/5/2012	12:37:51 PM	SiCl4 post valve closed
2/5/2012	12:37:51 PM	Bypass valve closed
2/5/2012	12:37:51 PM	Bubbler valve closed
2/5/2012	12:37:51 PM	Helium valve opened
2/5/2012	12:37:51 PM	Main Vac valve opened
2/5/2012	12:37:51 PM	Helium MFC set to  20.000000
2/5/2012	12:37:51 PM	H2 MFC set to  0.000000
2/5/2012	12:37:51 PM	BCl3 MFC set to  0.000000
2/5/2012	12:37:51 PM	PH3 MFC set to  0.000000
2/5/2012	12:37:51 PM	SiCl4 MFC set to  0.000000
2/5/2012	12:37:51 PM	Bypass solenoid MFC set to  0.000000
2/5/2012	12:37:51 PM	Tube furnace set to 150
2/5/2012	12:38:21 PM	Helium valve closed
2/5/2012	12:38:21 PM	H2 valve closed
2/5/2012	12:38:21 PM	BCl3 valve closed
2/5/2012	12:38:21 PM	PH3 valve closed
2/5/2012	12:38:21 PM	SiCl4 pre valve closed
2/5/2012	12:38:21 PM	SiCl4 post valve closed
2/5/2012	12:38:21 PM	Bypass valve closed
2/5/2012	12:38:21 PM	Bubbler valve closed
2/5/2012	12:38:21 PM	Main Vac valve opened
2/5/2012	12:38:21 PM	Helium MFC set to  0.000000
2/5/2012	12:38:21 PM	H2 MFC set to  0.000000
2/5/2012	12:38:21 PM	BCl3 MFC set to  0.000000
2/5/2012	12:38:21 PM	PH3 MFC set to  0.000000
2/5/2012	12:38:21 PM	SiCl4 MFC set to  0.000000
2/5/2012	12:38:21 PM	Bypass solenoid MFC set to  0.000000
2/5/2012	12:38:21 PM	Tube furnace set to 150
2/5/2012	12:38:51 PM	H2 valve closed
2/5/2012	12:38:51 PM	BCl3 valve closed
2/5/2012	12:38:51 PM	PH3 valve closed
2/5/2012	12:38:51 PM	SiCl4 pre valve closed
2/5/2012	12:38:51 PM	SiCl4 post valve closed
2/5/2012	12:38:51 PM	Bypass valve closed
2/5/2012	12:38:51 PM	Bubbler valve closed
2/5/2012	12:38:51 PM	Helium valve opened
2/5/2012	12:38:51 PM	Main Vac valve opened
2/5/2012	12:38:51 PM	Helium MFC set to  20.000000
2/5/2012	12:38:51 PM	H2 MFC set to  0.000000
2/5/2012	12:38:51 PM	BCl3 MFC set to  0.000000
2/5/2012	12:38:51 PM	PH3 MFC set to  0.000000
2/5/2012	12:38:51 PM	SiCl4 MFC set to  0.000000
2/5/2012	12:38:51 PM	Bypass solenoid MFC set to  0.000000
2/5/2012	12:38:51 PM	Tube furnace set to 150
2/5/2012	12:39:22 PM	Helium valve closed
2/5/2012	12:39:22 PM	H2 valve closed
2/5/2012	12:39:22 PM	BCl3 valve closed
2/5/2012	12:39:22 PM	PH3 valve closed
2/5/2012	12:39:22 PM	SiCl4 pre valve closed
2/5/2012	12:39:22 PM	SiCl4 post valve closed
2/5/2012	12:39:22 PM	Bypass valve closed
2/5/2012	12:39:22 PM	Bubbler valve closed
2/5/2012	12:39:22 PM	Main Vac valve opened
2/5/2012	12:39:22 PM	Helium MFC set to  0.000000
2/5/2012	12:39:22 PM	H2 MFC set to  0.000000
2/5/2012	12:39:22 PM	BCl3 MFC set to  0.000000
2/5/2012	12:39:22 PM	PH3 MFC set to  0.000000
2/5/2012	12:39:22 PM	SiCl4 MFC set to  0.000000
2/5/2012	12:39:22 PM	Bypass solenoid MFC set to  0.000000
2/5/2012	12:39:22 PM	Tube furnace set to 150
2/5/2012	12:39:52 PM	H2 valve closed
2/5/2012	12:39:52 PM	BCl3 valve closed
2/5/2012	12:39:52 PM	PH3 valve closed
2/5/2012	12:39:52 PM	SiCl4 pre valve closed
2/5/2012	12:39:52 PM	SiCl4 post valve closed
2/5/2012	12:39:52 PM	Bypass valve closed
2/5/2012	12:39:52 PM	Bubbler valve closed
2/5/2012	12:39:52 PM	Helium valve opened
2/5/2012	12:39:52 PM	Main Vac valve opened
2/5/2012	12:39:52 PM	Helium MFC set to  20.000000
2/5/2012	12:39:52 PM	H2 MFC set to  0.000000
2/5/2012	12:39:52 PM	BCl3 MFC set to  0.000000
2/5/2012	12:39:52 PM	PH3 MFC set to  0.000000
2/5/2012	12:39:52 PM	SiCl4 MFC set to  0.000000
2/5/2012	12:39:52 PM	Bypass solenoid MFC set to  0.000000
2/5/2012	12:39:52 PM	Tube furnace set to 150
2/5/2012	12:40:22 PM	Helium valve closed
2/5/2012	12:40:22 PM	H2 valve closed
2/5/2012	12:40:22 PM	BCl3 valve closed
2/5/2012	12:40:22 PM	PH3 valve closed
2/5/2012	12:40:22 PM	SiCl4 pre valve closed
2/5/2012	12:40:22 PM	SiCl4 post valve closed
2/5/2012	12:40:22 PM	Bypass valve closed
2/5/2012	12:40:22 PM	Bubbler valve closed
2/5/2012	12:40:22 PM	Main Vac valve opened
2/5/2012	12:40:22 PM	Helium MFC set to  0.000000
2/5/2012	12:40:22 PM	H2 MFC set to  0.000000
2/5/2012	12:40:22 PM	BCl3 MFC set to  0.000000
2/5/2012	12:40:22 PM	PH3 MFC set to  0.000000
2/5/2012	12:40:22 PM	SiCl4 MFC set to  0.000000
2/5/2012	12:40:22 PM	Bypass solenoid MFC set to  0.000000
2/5/2012	12:40:22 PM	Tube furnace set to 150
2/5/2012	12:40:23 PM	Run finished at 12:40 PM
2/5/2012	1:21:44 PM	Main Vac valve closed
2/5/2012	1:22:06 PM	Main Vac valve opened
2/5/2012	1:23:26 PM	Recipe started at 1:23 PM
2/5/2012	1:23:26 PM	Helium valve closed
2/5/2012	1:23:26 PM	H2 valve closed
2/5/2012	1:23:26 PM	BCl3 valve closed
2/5/2012	1:23:26 PM	PH3 valve closed
2/5/2012	1:23:26 PM	SiCl4 pre valve closed
2/5/2012	1:23:26 PM	SiCl4 post valve closed
2/5/2012	1:23:26 PM	Main Vac valve closed
2/5/2012	1:23:26 PM	Bypass valve closed
2/5/2012	1:23:26 PM	Bubbler valve closed
2/5/2012	1:23:26 PM	Helium MFC set to  0.000000
2/5/2012	1:23:26 PM	H2 MFC set to  0.000000
2/5/2012	1:23:26 PM	BCl3 MFC set to  0.000000
2/5/2012	1:23:26 PM	PH3 MFC set to  0.000000
2/5/2012	1:23:26 PM	SiCl4 MFC set to  0.000000
2/5/2012	1:23:26 PM	Bypass solenoid MFC set to  0.000000
2/5/2012	1:23:26 PM	Tube furnace set to 0
2/5/2012	1:23:29 PM	Helium valve closed
2/5/2012	1:23:29 PM	BCl3 valve closed
2/5/2012	1:23:29 PM	PH3 valve closed
2/5/2012	1:23:29 PM	SiCl4 pre valve closed
2/5/2012	1:23:29 PM	SiCl4 post valve closed
2/5/2012	1:23:29 PM	Main Vac valve closed
2/5/2012	1:23:29 PM	Bypass valve closed
2/5/2012	1:23:29 PM	Bubbler valve closed
2/5/2012	1:23:29 PM	H2 valve opened
2/5/2012	1:23:29 PM	Helium MFC set to  0.000000
2/5/2012	1:23:29 PM	H2 MFC set to  500.000000
2/5/2012	1:23:29 PM	BCl3 MFC set to  0.000000
2/5/2012	1:23:29 PM	PH3 MFC set to  0.000000
2/5/2012	1:23:29 PM	SiCl4 MFC set to  0.000000
2/5/2012	1:23:29 PM	Bypass solenoid MFC set to  0.000000
2/5/2012	1:23:29 PM	Tube furnace set to 0
2/5/2012	1:24:34 PM	Helium valve closed
2/5/2012	1:24:34 PM	BCl3 valve closed
2/5/2012	1:24:34 PM	PH3 valve closed
2/5/2012	1:24:34 PM	SiCl4 pre valve closed
2/5/2012	1:24:34 PM	SiCl4 post valve closed
2/5/2012	1:24:34 PM	Main Vac valve closed
2/5/2012	1:24:34 PM	Bypass valve closed
2/5/2012	1:24:34 PM	H2 valve opened
2/5/2012	1:24:34 PM	Bubbler valve opened
2/5/2012	1:24:34 PM	Helium MFC set to  0.000000
2/5/2012	1:24:34 PM	H2 MFC set to  500.000000
2/5/2012	1:24:34 PM	BCl3 MFC set to  0.000000
2/5/2012	1:24:34 PM	PH3 MFC set to  0.000000
2/5/2012	1:24:34 PM	SiCl4 MFC set to  0.000000
2/5/2012	1:24:34 PM	Bypass solenoid MFC set to  0.000000
2/5/2012	1:24:34 PM	Tube furnace set to 0
2/5/2012	1:24:35 PM	Helium valve closed
2/5/2012	1:24:35 PM	BCl3 valve closed
2/5/2012	1:24:35 PM	PH3 valve closed
2/5/2012	1:24:35 PM	SiCl4 pre valve closed
2/5/2012	1:24:35 PM	SiCl4 post valve closed
2/5/2012	1:24:35 PM	Main Vac valve closed
2/5/2012	1:24:35 PM	Bypass valve closed
2/5/2012	1:24:35 PM	H2 valve opened
2/5/2012	1:24:35 PM	Bubbler valve opened
2/5/2012	1:24:35 PM	Helium MFC set to  0.000000
2/5/2012	1:24:35 PM	H2 MFC set to  500.000000
2/5/2012	1:24:35 PM	BCl3 MFC set to  0.000000
2/5/2012	1:24:35 PM	PH3 MFC set to  0.000000
2/5/2012	1:24:35 PM	SiCl4 MFC set to  0.000000
2/5/2012	1:24:35 PM	Bypass solenoid MFC set to  0.000000
2/5/2012	1:24:35 PM	Tube furnace set to 1000
2/5/2012	1:49:35 PM	Helium valve closed
2/5/2012	1:49:35 PM	BCl3 valve closed
2/5/2012	1:49:35 PM	Main Vac valve closed
2/5/2012	1:49:35 PM	Bypass valve closed
2/5/2012	1:49:35 PM	H2 valve opened
2/5/2012	1:49:35 PM	PH3 valve opened
2/5/2012	1:49:35 PM	SiCl4 pre valve opened
2/5/2012	1:49:35 PM	SiCl4 post valve opened
2/5/2012	1:49:35 PM	Bubbler valve opened
2/5/2012	1:49:35 PM	Helium MFC set to  0.000000
2/5/2012	1:49:35 PM	H2 MFC set to  500.000000
2/5/2012	1:49:35 PM	BCl3 MFC set to  0.000000
2/5/2012	1:49:35 PM	PH3 MFC set to  0.250000
2/5/2012	1:49:35 PM	SiCl4 MFC set to  25.000000
2/5/2012	1:49:35 PM	Bypass solenoid MFC set to  0.000000
2/5/2012	1:49:35 PM	Tube furnace set to 1000
2/5/2012	2:14:35 PM	Helium valve closed
2/5/2012	2:14:35 PM	BCl3 valve closed
2/5/2012	2:14:35 PM	PH3 valve closed
2/5/2012	2:14:35 PM	SiCl4 pre valve closed
2/5/2012	2:14:35 PM	SiCl4 post valve closed
2/5/2012	2:14:35 PM	Main Vac valve closed
2/5/2012	2:14:35 PM	Bypass valve closed
2/5/2012	2:14:35 PM	H2 valve opened
2/5/2012	2:14:35 PM	Bubbler valve opened
2/5/2012	2:14:35 PM	Helium MFC set to  0.000000
2/5/2012	2:14:35 PM	H2 MFC set to  500.000000
2/5/2012	2:14:35 PM	BCl3 MFC set to  0.000000
2/5/2012	2:14:35 PM	PH3 MFC set to  0.000000
2/5/2012	2:14:35 PM	SiCl4 MFC set to  0.000000
2/5/2012	2:14:35 PM	Bypass solenoid MFC set to  0.000000
2/5/2012	2:14:35 PM	Tube furnace set to 750
2/5/2012	2:19:36 PM	H2 valve closed
2/5/2012	2:19:36 PM	BCl3 valve closed
2/5/2012	2:19:36 PM	PH3 valve closed
2/5/2012	2:19:36 PM	SiCl4 pre valve closed
2/5/2012	2:19:36 PM	SiCl4 post valve closed
2/5/2012	2:19:36 PM	Main Vac valve closed
2/5/2012	2:19:36 PM	Bypass valve closed
2/5/2012	2:19:36 PM	Helium valve opened
2/5/2012	2:19:36 PM	Bubbler valve opened
2/5/2012	2:19:36 PM	Helium MFC set to  500.000000
2/5/2012	2:19:36 PM	H2 MFC set to  0.000000
2/5/2012	2:19:36 PM	BCl3 MFC set to  0.000000
2/5/2012	2:19:36 PM	PH3 MFC set to  0.000000
2/5/2012	2:19:36 PM	SiCl4 MFC set to  0.000000
2/5/2012	2:19:36 PM	Bypass solenoid MFC set to  0.000000
2/5/2012	2:19:36 PM	Tube furnace set to 0
2/5/2012	2:39:36 PM	Helium valve closed
2/5/2012	2:39:36 PM	H2 valve closed
2/5/2012	2:39:36 PM	BCl3 valve closed
2/5/2012	2:39:36 PM	PH3 valve closed
2/5/2012	2:39:36 PM	SiCl4 pre valve closed
2/5/2012	2:39:36 PM	SiCl4 post valve closed
2/5/2012	2:39:36 PM	Main Vac valve closed
2/5/2012	2:39:36 PM	Bypass valve closed
2/5/2012	2:39:36 PM	Bubbler valve closed
2/5/2012	2:39:36 PM	Helium MFC set to  0.000000
2/5/2012	2:39:36 PM	H2 MFC set to  0.000000
2/5/2012	2:39:36 PM	BCl3 MFC set to  0.000000
2/5/2012	2:39:36 PM	PH3 MFC set to  0.000000
2/5/2012	2:39:36 PM	SiCl4 MFC set to  0.000000
2/5/2012	2:39:36 PM	Bypass solenoid MFC set to  0.000000
2/5/2012	2:39:36 PM	Tube furnace set to 0
2/5/2012	2:39:37 PM	Run finished at 2:39 PM
2/5/2012	3:29:18 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/5/2012	3:29:19 PM	Recipe started at 3:29 PM
2/5/2012	3:29:19 PM	Helium valve closed
2/5/2012	3:29:19 PM	H2 valve closed
2/5/2012	3:29:19 PM	BCl3 valve closed
2/5/2012	3:29:19 PM	PH3 valve closed
2/5/2012	3:29:19 PM	SiCl4 pre valve closed
2/5/2012	3:29:19 PM	SiCl4 post valve closed
2/5/2012	3:29:19 PM	Main Vac valve closed
2/5/2012	3:29:19 PM	Bypass valve closed
2/5/2012	3:29:19 PM	Bubbler valve closed
2/5/2012	3:29:19 PM	Helium MFC set to  0.000000
2/5/2012	3:29:19 PM	H2 MFC set to  0.000000
2/5/2012	3:29:19 PM	BCl3 MFC set to  0.000000
2/5/2012	3:29:19 PM	PH3 MFC set to  0.000000
2/5/2012	3:29:19 PM	SiCl4 MFC set to  0.000000
2/5/2012	3:29:19 PM	Bypass solenoid MFC set to  0.000000
2/5/2012	3:29:19 PM	Tube furnace set to 0
2/5/2012	3:29:22 PM	H2 valve closed
2/5/2012	3:29:22 PM	BCl3 valve closed
2/5/2012	3:29:22 PM	PH3 valve closed
2/5/2012	3:29:22 PM	SiCl4 pre valve closed
2/5/2012	3:29:22 PM	SiCl4 post valve closed
2/5/2012	3:29:22 PM	Main Vac valve closed
2/5/2012	3:29:22 PM	Bypass valve closed
2/5/2012	3:29:22 PM	Bubbler valve closed
2/5/2012	3:29:22 PM	Helium valve opened
2/5/2012	3:29:22 PM	Helium MFC set to  500.000000
2/5/2012	3:29:22 PM	H2 MFC set to  0.000000
2/5/2012	3:29:22 PM	BCl3 MFC set to  0.000000
2/5/2012	3:29:22 PM	PH3 MFC set to  0.000000
2/5/2012	3:29:22 PM	SiCl4 MFC set to  0.000000
2/5/2012	3:29:22 PM	Bypass solenoid MFC set to  0.000000
2/5/2012	3:29:22 PM	Tube furnace set to 0
2/5/2012	3:29:28 PM	Helium valve closed
2/5/2012	3:29:28 PM	H2 valve closed
2/5/2012	3:29:28 PM	BCl3 valve closed
2/5/2012	3:29:28 PM	PH3 valve closed
2/5/2012	3:29:28 PM	SiCl4 pre valve closed
2/5/2012	3:29:28 PM	SiCl4 post valve closed
2/5/2012	3:29:28 PM	Main Vac valve closed
2/5/2012	3:29:28 PM	Bypass valve closed
2/5/2012	3:29:28 PM	Bubbler valve closed
2/5/2012	3:29:28 PM	Helium MFC set to  0.000000
2/5/2012	3:29:28 PM	H2 MFC set to  0.000000
2/5/2012	3:29:28 PM	BCl3 MFC set to  0.000000
2/5/2012	3:29:28 PM	PH3 MFC set to  0.000000
2/5/2012	3:29:28 PM	SiCl4 MFC set to  0.000000
2/5/2012	3:29:28 PM	Bypass solenoid MFC set to  0.000000
2/5/2012	3:29:28 PM	Tube furnace set to 0
2/5/2012	3:29:29 PM	Run finished at 3:29 PM
2/5/2012	3:29:29 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/5/2012	3:32:39 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/5/2012	3:32:40 PM	Recipe started at 3:32 PM
2/5/2012	3:32:40 PM	Helium valve closed
2/5/2012	3:32:40 PM	H2 valve closed
2/5/2012	3:32:40 PM	BCl3 valve closed
2/5/2012	3:32:40 PM	PH3 valve closed
2/5/2012	3:32:40 PM	SiCl4 pre valve closed
2/5/2012	3:32:40 PM	SiCl4 post valve closed
2/5/2012	3:32:40 PM	Main Vac valve closed
2/5/2012	3:32:40 PM	Bubbler valve closed
2/5/2012	3:32:40 PM	Bypass valve opened
2/5/2012	3:32:40 PM	Helium MFC set to  0.000000
2/5/2012	3:32:40 PM	H2 MFC set to  0.000000
2/5/2012	3:32:40 PM	BCl3 MFC set to  0.000000
2/5/2012	3:32:40 PM	PH3 MFC set to  0.000000
2/5/2012	3:32:40 PM	SiCl4 MFC set to  0.000000
2/5/2012	3:32:40 PM	Bypass solenoid MFC set to  0.000000
2/5/2012	3:32:40 PM	Tube furnace set to 0
2/5/2012	3:33:34 PM	Helium valve closed
2/5/2012	3:33:34 PM	H2 valve closed
2/5/2012	3:33:34 PM	BCl3 valve closed
2/5/2012	3:33:34 PM	PH3 valve closed
2/5/2012	3:33:34 PM	SiCl4 pre valve closed
2/5/2012	3:33:34 PM	SiCl4 post valve closed
2/5/2012	3:33:34 PM	Main Vac valve closed
2/5/2012	3:33:34 PM	Bubbler valve closed
2/5/2012	3:33:34 PM	Bypass valve opened
2/5/2012	3:33:34 PM	Helium MFC set to  0.000000
2/5/2012	3:33:34 PM	H2 MFC set to  0.000000
2/5/2012	3:33:34 PM	BCl3 MFC set to  0.000000
2/5/2012	3:33:34 PM	PH3 MFC set to  0.000000
2/5/2012	3:33:34 PM	SiCl4 MFC set to  0.000000
2/5/2012	3:33:34 PM	Bypass solenoid MFC set to  0.000000
2/5/2012	3:33:34 PM	Tube furnace set to 0
2/5/2012	3:34:34 PM	Helium valve closed
2/5/2012	3:34:34 PM	H2 valve closed
2/5/2012	3:34:34 PM	BCl3 valve closed
2/5/2012	3:34:34 PM	PH3 valve closed
2/5/2012	3:34:34 PM	SiCl4 pre valve closed
2/5/2012	3:34:34 PM	SiCl4 post valve closed
2/5/2012	3:34:34 PM	Bypass valve closed
2/5/2012	3:34:34 PM	Bubbler valve closed
2/5/2012	3:34:34 PM	Main Vac valve opened
2/5/2012	3:34:34 PM	Helium MFC set to  0.000000
2/5/2012	3:34:34 PM	H2 MFC set to  0.000000
2/5/2012	3:34:34 PM	BCl3 MFC set to  0.000000
2/5/2012	3:34:34 PM	PH3 MFC set to  0.000000
2/5/2012	3:34:34 PM	SiCl4 MFC set to  0.000000
2/5/2012	3:34:34 PM	Bypass solenoid MFC set to  0.000000
2/5/2012	3:34:35 PM	Tube furnace set to 0
2/5/2012	3:34:36 PM	Run finished at 3:34 PM
2/5/2012	3:34:36 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/5/2012	6:10:44 PM	Main Vac valve closed
2/5/2012	6:11:17 PM	Main Vac valve opened
2/5/2012	6:12:06 PM	Recipe started at 6:12 PM
2/5/2012	6:12:06 PM	Helium valve closed
2/5/2012	6:12:06 PM	H2 valve closed
2/5/2012	6:12:06 PM	BCl3 valve closed
2/5/2012	6:12:06 PM	PH3 valve closed
2/5/2012	6:12:06 PM	SiCl4 pre valve closed
2/5/2012	6:12:06 PM	SiCl4 post valve closed
2/5/2012	6:12:06 PM	Main Vac valve closed
2/5/2012	6:12:06 PM	Bypass valve closed
2/5/2012	6:12:06 PM	Bubbler valve closed
2/5/2012	6:12:06 PM	Helium MFC set to  0.000000
2/5/2012	6:12:06 PM	H2 MFC set to  0.000000
2/5/2012	6:12:06 PM	BCl3 MFC set to  0.000000
2/5/2012	6:12:06 PM	PH3 MFC set to  0.000000
2/5/2012	6:12:06 PM	SiCl4 MFC set to  0.000000
2/5/2012	6:12:06 PM	Bypass solenoid MFC set to  0.000000
2/5/2012	6:12:06 PM	Tube furnace set to 0
2/5/2012	6:12:09 PM	Helium valve closed
2/5/2012	6:12:09 PM	BCl3 valve closed
2/5/2012	6:12:09 PM	PH3 valve closed
2/5/2012	6:12:09 PM	SiCl4 pre valve closed
2/5/2012	6:12:09 PM	SiCl4 post valve closed
2/5/2012	6:12:09 PM	Main Vac valve closed
2/5/2012	6:12:09 PM	Bypass valve closed
2/5/2012	6:12:09 PM	Bubbler valve closed
2/5/2012	6:12:09 PM	H2 valve opened
2/5/2012	6:12:09 PM	Helium MFC set to  0.000000
2/5/2012	6:12:09 PM	H2 MFC set to  500.000000
2/5/2012	6:12:09 PM	BCl3 MFC set to  0.000000
2/5/2012	6:12:09 PM	PH3 MFC set to  0.000000
2/5/2012	6:12:09 PM	SiCl4 MFC set to  0.000000
2/5/2012	6:12:09 PM	Bypass solenoid MFC set to  0.000000
2/5/2012	6:12:09 PM	Tube furnace set to 0
2/5/2012	6:13:17 PM	Helium valve closed
2/5/2012	6:13:17 PM	BCl3 valve closed
2/5/2012	6:13:17 PM	PH3 valve closed
2/5/2012	6:13:17 PM	SiCl4 pre valve closed
2/5/2012	6:13:17 PM	SiCl4 post valve closed
2/5/2012	6:13:17 PM	Main Vac valve closed
2/5/2012	6:13:17 PM	Bypass valve closed
2/5/2012	6:13:17 PM	H2 valve opened
2/5/2012	6:13:17 PM	Bubbler valve opened
2/5/2012	6:13:17 PM	Helium MFC set to  0.000000
2/5/2012	6:13:17 PM	H2 MFC set to  500.000000
2/5/2012	6:13:17 PM	BCl3 MFC set to  0.000000
2/5/2012	6:13:17 PM	PH3 MFC set to  0.000000
2/5/2012	6:13:17 PM	SiCl4 MFC set to  0.000000
2/5/2012	6:13:17 PM	Bypass solenoid MFC set to  0.000000
2/5/2012	6:13:17 PM	Tube furnace set to 0
2/5/2012	6:13:18 PM	Helium valve closed
2/5/2012	6:13:18 PM	BCl3 valve closed
2/5/2012	6:13:18 PM	PH3 valve closed
2/5/2012	6:13:18 PM	SiCl4 pre valve closed
2/5/2012	6:13:18 PM	SiCl4 post valve closed
2/5/2012	6:13:18 PM	Main Vac valve closed
2/5/2012	6:13:18 PM	Bypass valve closed
2/5/2012	6:13:18 PM	H2 valve opened
2/5/2012	6:13:18 PM	Bubbler valve opened
2/5/2012	6:13:18 PM	Helium MFC set to  0.000000
2/5/2012	6:13:18 PM	H2 MFC set to  500.000000
2/5/2012	6:13:18 PM	BCl3 MFC set to  0.000000
2/5/2012	6:13:18 PM	PH3 MFC set to  0.000000
2/5/2012	6:13:18 PM	SiCl4 MFC set to  0.000000
2/5/2012	6:13:18 PM	Bypass solenoid MFC set to  0.000000
2/5/2012	6:13:18 PM	Tube furnace set to 1000
2/5/2012	6:43:18 PM	Helium valve closed
2/5/2012	6:43:18 PM	BCl3 valve closed
2/5/2012	6:43:18 PM	Main Vac valve closed
2/5/2012	6:43:18 PM	Bypass valve closed
2/5/2012	6:43:18 PM	H2 valve opened
2/5/2012	6:43:18 PM	PH3 valve opened
2/5/2012	6:43:18 PM	SiCl4 pre valve opened
2/5/2012	6:43:18 PM	SiCl4 post valve opened
2/5/2012	6:43:18 PM	Bubbler valve opened
2/5/2012	6:43:18 PM	Helium MFC set to  0.000000
2/5/2012	6:43:18 PM	H2 MFC set to  500.000000
2/5/2012	6:43:18 PM	BCl3 MFC set to  0.000000
2/5/2012	6:43:18 PM	PH3 MFC set to  0.300000
2/5/2012	6:43:18 PM	SiCl4 MFC set to  25.000000
2/5/2012	6:43:18 PM	Bypass solenoid MFC set to  0.000000
2/5/2012	6:43:18 PM	Tube furnace set to 1000
2/5/2012	7:08:18 PM	Helium valve closed
2/5/2012	7:08:18 PM	BCl3 valve closed
2/5/2012	7:08:18 PM	PH3 valve closed
2/5/2012	7:08:18 PM	SiCl4 pre valve closed
2/5/2012	7:08:18 PM	SiCl4 post valve closed
2/5/2012	7:08:18 PM	Main Vac valve closed
2/5/2012	7:08:18 PM	Bypass valve closed
2/5/2012	7:08:18 PM	H2 valve opened
2/5/2012	7:08:18 PM	Bubbler valve opened
2/5/2012	7:08:18 PM	Helium MFC set to  0.000000
2/5/2012	7:08:18 PM	H2 MFC set to  500.000000
2/5/2012	7:08:18 PM	BCl3 MFC set to  0.000000
2/5/2012	7:08:18 PM	PH3 MFC set to  0.000000
2/5/2012	7:08:18 PM	SiCl4 MFC set to  0.000000
2/5/2012	7:08:18 PM	Bypass solenoid MFC set to  0.000000
2/5/2012	7:08:19 PM	Tube furnace set to 750
2/5/2012	7:13:19 PM	H2 valve closed
2/5/2012	7:13:19 PM	BCl3 valve closed
2/5/2012	7:13:19 PM	PH3 valve closed
2/5/2012	7:13:19 PM	SiCl4 pre valve closed
2/5/2012	7:13:19 PM	SiCl4 post valve closed
2/5/2012	7:13:19 PM	Main Vac valve closed
2/5/2012	7:13:19 PM	Bypass valve closed
2/5/2012	7:13:19 PM	Helium valve opened
2/5/2012	7:13:19 PM	Bubbler valve opened
2/5/2012	7:13:19 PM	Helium MFC set to  500.000000
2/5/2012	7:13:19 PM	H2 MFC set to  0.000000
2/5/2012	7:13:19 PM	BCl3 MFC set to  0.000000
2/5/2012	7:13:19 PM	PH3 MFC set to  0.000000
2/5/2012	7:13:19 PM	SiCl4 MFC set to  0.000000
2/5/2012	7:13:19 PM	Bypass solenoid MFC set to  0.000000
2/5/2012	7:13:19 PM	Tube furnace set to 0
2/5/2012	7:33:19 PM	Helium valve closed
2/5/2012	7:33:19 PM	H2 valve closed
2/5/2012	7:33:19 PM	BCl3 valve closed
2/5/2012	7:33:19 PM	PH3 valve closed
2/5/2012	7:33:19 PM	SiCl4 pre valve closed
2/5/2012	7:33:19 PM	SiCl4 post valve closed
2/5/2012	7:33:19 PM	Main Vac valve closed
2/5/2012	7:33:19 PM	Bypass valve closed
2/5/2012	7:33:19 PM	Bubbler valve closed
2/5/2012	7:33:19 PM	Helium MFC set to  0.000000
2/5/2012	7:33:19 PM	H2 MFC set to  0.000000
2/5/2012	7:33:19 PM	BCl3 MFC set to  0.000000
2/5/2012	7:33:19 PM	PH3 MFC set to  0.000000
2/5/2012	7:33:19 PM	SiCl4 MFC set to  0.000000
2/5/2012	7:33:19 PM	Bypass solenoid MFC set to  0.000000
2/5/2012	7:33:19 PM	Tube furnace set to 0
2/5/2012	7:33:20 PM	Run finished at 7:33 PM
2/5/2012	7:45:20 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/5/2012	7:45:21 PM	Recipe started at 7:45 PM
2/5/2012	7:45:21 PM	Helium valve closed
2/5/2012	7:45:21 PM	H2 valve closed
2/5/2012	7:45:21 PM	BCl3 valve closed
2/5/2012	7:45:21 PM	PH3 valve closed
2/5/2012	7:45:21 PM	SiCl4 pre valve closed
2/5/2012	7:45:21 PM	SiCl4 post valve closed
2/5/2012	7:45:21 PM	Main Vac valve closed
2/5/2012	7:45:21 PM	Bypass valve closed
2/5/2012	7:45:21 PM	Bubbler valve closed
2/5/2012	7:45:21 PM	Helium MFC set to  0.000000
2/5/2012	7:45:21 PM	H2 MFC set to  0.000000
2/5/2012	7:45:21 PM	BCl3 MFC set to  0.000000
2/5/2012	7:45:21 PM	PH3 MFC set to  0.000000
2/5/2012	7:45:21 PM	SiCl4 MFC set to  0.000000
2/5/2012	7:45:21 PM	Bypass solenoid MFC set to  0.000000
2/5/2012	7:45:21 PM	Tube furnace set to 0
2/5/2012	7:45:24 PM	H2 valve closed
2/5/2012	7:45:24 PM	BCl3 valve closed
2/5/2012	7:45:24 PM	PH3 valve closed
2/5/2012	7:45:24 PM	SiCl4 pre valve closed
2/5/2012	7:45:24 PM	SiCl4 post valve closed
2/5/2012	7:45:24 PM	Main Vac valve closed
2/5/2012	7:45:24 PM	Bypass valve closed
2/5/2012	7:45:24 PM	Bubbler valve closed
2/5/2012	7:45:24 PM	Helium valve opened
2/5/2012	7:45:24 PM	Helium MFC set to  500.000000
2/5/2012	7:45:24 PM	H2 MFC set to  0.000000
2/5/2012	7:45:24 PM	BCl3 MFC set to  0.000000
2/5/2012	7:45:24 PM	PH3 MFC set to  0.000000
2/5/2012	7:45:24 PM	SiCl4 MFC set to  0.000000
2/5/2012	7:45:24 PM	Bypass solenoid MFC set to  0.000000
2/5/2012	7:45:25 PM	Tube furnace set to 0
2/5/2012	7:45:28 PM	Helium valve closed
2/5/2012	7:45:28 PM	H2 valve closed
2/5/2012	7:45:28 PM	BCl3 valve closed
2/5/2012	7:45:28 PM	PH3 valve closed
2/5/2012	7:45:28 PM	SiCl4 pre valve closed
2/5/2012	7:45:28 PM	SiCl4 post valve closed
2/5/2012	7:45:28 PM	Main Vac valve closed
2/5/2012	7:45:28 PM	Bypass valve closed
2/5/2012	7:45:28 PM	Bubbler valve closed
2/5/2012	7:45:28 PM	Helium MFC set to  0.000000
2/5/2012	7:45:28 PM	H2 MFC set to  0.000000
2/5/2012	7:45:28 PM	BCl3 MFC set to  0.000000
2/5/2012	7:45:28 PM	PH3 MFC set to  0.000000
2/5/2012	7:45:28 PM	SiCl4 MFC set to  0.000000
2/5/2012	7:45:28 PM	Bypass solenoid MFC set to  0.000000
2/5/2012	7:45:28 PM	Tube furnace set to 0
2/5/2012	7:45:29 PM	Run finished at 7:45 PM
2/5/2012	7:45:29 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/5/2012	7:47:22 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/5/2012	7:47:23 PM	Recipe started at 7:47 PM
2/5/2012	7:47:23 PM	Helium valve closed
2/5/2012	7:47:23 PM	H2 valve closed
2/5/2012	7:47:23 PM	BCl3 valve closed
2/5/2012	7:47:23 PM	PH3 valve closed
2/5/2012	7:47:23 PM	SiCl4 pre valve closed
2/5/2012	7:47:23 PM	SiCl4 post valve closed
2/5/2012	7:47:23 PM	Main Vac valve closed
2/5/2012	7:47:23 PM	Bubbler valve closed
2/5/2012	7:47:23 PM	Bypass valve opened
2/5/2012	7:47:23 PM	Helium MFC set to  0.000000
2/5/2012	7:47:23 PM	H2 MFC set to  0.000000
2/5/2012	7:47:23 PM	BCl3 MFC set to  0.000000
2/5/2012	7:47:23 PM	PH3 MFC set to  0.000000
2/5/2012	7:47:23 PM	SiCl4 MFC set to  0.000000
2/5/2012	7:47:23 PM	Bypass solenoid MFC set to  0.000000
2/5/2012	7:47:23 PM	Tube furnace set to 0
2/5/2012	7:48:19 PM	Helium valve closed
2/5/2012	7:48:19 PM	H2 valve closed
2/5/2012	7:48:19 PM	BCl3 valve closed
2/5/2012	7:48:19 PM	PH3 valve closed
2/5/2012	7:48:19 PM	SiCl4 pre valve closed
2/5/2012	7:48:19 PM	SiCl4 post valve closed
2/5/2012	7:48:19 PM	Main Vac valve closed
2/5/2012	7:48:19 PM	Bubbler valve closed
2/5/2012	7:48:19 PM	Bypass valve opened
2/5/2012	7:48:19 PM	Helium MFC set to  0.000000
2/5/2012	7:48:19 PM	H2 MFC set to  0.000000
2/5/2012	7:48:19 PM	BCl3 MFC set to  0.000000
2/5/2012	7:48:19 PM	PH3 MFC set to  0.000000
2/5/2012	7:48:19 PM	SiCl4 MFC set to  0.000000
2/5/2012	7:48:19 PM	Bypass solenoid MFC set to  0.000000
2/5/2012	7:48:19 PM	Tube furnace set to 0
2/5/2012	7:49:20 PM	Helium valve closed
2/5/2012	7:49:20 PM	H2 valve closed
2/5/2012	7:49:20 PM	BCl3 valve closed
2/5/2012	7:49:20 PM	PH3 valve closed
2/5/2012	7:49:20 PM	SiCl4 pre valve closed
2/5/2012	7:49:20 PM	SiCl4 post valve closed
2/5/2012	7:49:20 PM	Bypass valve closed
2/5/2012	7:49:20 PM	Bubbler valve closed
2/5/2012	7:49:20 PM	Main Vac valve opened
2/5/2012	7:49:20 PM	Helium MFC set to  0.000000
2/5/2012	7:49:20 PM	H2 MFC set to  0.000000
2/5/2012	7:49:20 PM	BCl3 MFC set to  0.000000
2/5/2012	7:49:20 PM	PH3 MFC set to  0.000000
2/5/2012	7:49:20 PM	SiCl4 MFC set to  0.000000
2/5/2012	7:49:20 PM	Bypass solenoid MFC set to  0.000000
2/5/2012	7:49:20 PM	Tube furnace set to 0
2/5/2012	7:49:21 PM	Run finished at 7:49 PM
2/5/2012	7:49:21 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
